Thermal Mass Flow Controller/ Meter "SLA5800 Series"

The operating principles of the SLA series are explained in the video. (English) https://www.youtube.com/watch?v=XKpX3rrt1qc Video Chapters 00:00 What is Brooks Instrument? 00:10 How to connect power to the thermal mass flow meter 00:24 Basic structure of the thermal mass flow meter 00:35 Diverting a portion of the gas flow with a laminar flow element 00:56 Measuring temperature difference with thermal sensors 01:08 Excellent sensor stability 01:37 How to measure process gas flow 02:17 Circuit board of the thermal mass flow meter 02:34 What are advanced alarm and diagnostic functions? <Main advantages of Coriolis flow meters> ■ Long-term stability of the sensor eliminates the need for maintenance or regular recalibration, reducing total ownership costs ■ Brooks Instrument's unique thermal sensor technology improves the S/N ratio and enhances flow accuracy at low set points.

The GP200 series is the first fully pressure-independent PMFC designed specifically for semiconductor applications. With GP200's unique differential pressure technology and state-of-the-art sensor and valve configuration, it eliminates the limitations of traditional pressure-based mass flow controllers, enabling the most extensive and accurate process gas control in the industry. Brooks developed the world's first MFC that allows for the reconfiguration of gas types and flow ranges, and has continued to refresh gas models since its release, with the same functionality incorporated into the GP200. It allows for easy reconfiguration for many gas types and a wide range of flow rates, providing flexible support for a variety of processes. The ultra-fast and highly reproducible valve control of the GP200, along with its resistance to pressure fluctuations, maintains precise flow control to the chamber even in cases of extreme supply pressure variations, enabling tighter process control. The GP200 platform supports a wide range of process conditions and can replace or upgrade many traditional pressure-based mass flow controllers.

When using a thermal mass flow meter, it is very important to understand its measurement principle. Setting high-precision and stable process conditions is not only essential but also very beneficial for troubleshooting and early detection. The sensor consists of a heater (H) placed in the center of the tube and temperature sensors (T1 and T2) positioned equidistantly on either side. The heater is continuously supplied with properly controlled power, generating heat. When there is no flow in the sensor tube, the heat from the heater is evenly transferred to temperature sensors T1 and T2, resulting in both being at the same temperature. However, when there is flow in the direction indicated by the arrows in the diagram, the fluid carries heat away from T1, causing its temperature to drop, while T2 receives heat, resulting in a temperature increase. The resulting temperature difference between T1 and T2 becomes a function of the mass flow rate of the fluid within the sensor tube. This is processed appropriately and output as an electrical signal representing the mass flow rate. (This is an excerpt from the original text.) https://www.youtube.com/watch?v=XKpX3rrt1qc [ITW Japan Co., Ltd. Brooks Instrument]

The SLA5800 series thermal mass flow controllers/meters are widely adopted as standard equipment due to their excellent accuracy, stability, and reliability. This series features a wide range of flow measurement capabilities and is suitable for various temperature and pressure conditions, making it ideal for a broad range of applications including research in the chemical and petrochemical fields, analytical instruments, fuel cells, and life sciences. Contents ■Features and Benefits ■Standard Specifications ■Product Dimensions ■Model Codes ■Approvals, Certifications, and Services ■Service and Support, etc.