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  1. Home
  2. Electronic Components and Semiconductors
  3. ティー・ケイ・エス
  4. We will exhibit at the MEMS Engineer Forum 2025.
OTHER
  • Apr 09, 2025
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Apr 09, 2025

We will exhibit at the MEMS Engineer Forum 2025.

ティー・ケイ・エス ティー・ケイ・エス
The MEMS Engineer Forum is a unique forum operated primarily by engineers among the key players in MEMS technology, which is considered a key technology of the 21st century. At this forum, where MEMS researchers, developers, and engineers from around the world gather, we will introduce and showcase the Remote Plasma Ion Beam Sputtering System manufactured by Plasma Quest Ltd. This is an excellent opportunity to see cutting-edge technologies related to MEMS, not only from our exhibition but also from others. We cordially invite you to attend. Venue: International Fashion Center Hall 1-6-1 Yokogawa, Sumida-ku, Tokyo 130-0015, Japan Access: https://www.tokyo-kfc.co.jp/access/ Exhibited Product: Remote Plasma Ion Beam Sputtering System by Plasma Quest Ltd. https://mono.ipros.com/product/detail/2001148974 https://www.plasmaquest.com/
MEF 2025 Official
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MEMS Engineer Forum 2025

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Plasma Quest Limited Company Introduction

Remote source ion beam sputtering device manufacturer for remote plasma sources.

PlasmaQuest is a reputable company with a 25-year history in the development and sales of helicon-type high-density ion sources and related application products. The gridless helicon plasma source generates high-density plasma and continues to provide OEM supply to many equipment manufacturers. Utilizing this high-quality plasma source as an ion source, the groundbreaking "HiTUS" system applies bias to the target, enabling sputtering under various conditions and with different targets. It allows for sputtering of high magnetic targets and high dielectric targets, which are considered difficult with conventional magnetron sputtering devices, as well as co-sputtering using heterogeneous targets such as metals and ceramics, making it suitable for a wide range of applications. The company is equipped to flexibly respond to both research applications and production-scale equipment.

  • Sputtering Equipment

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Remote plasma ion beam sputtering device

We achieve film formation by freely controlling reactive sputtering and alloy sputtering.

Independent current control is performed for the ion source, target, and substrate. With independent control, not only the sputter rate but also various reactive sputtering processes such as oxide and nitride films can be freely controlled. This device strongly supports advanced material research and process development, enabling the deposition of difficult-to-deposit materials such as ferromagnetic films, Co-sputtering of metal and ceramic targets, and dielectric/insulating films from metal targets. Independent control of ion supply and sputter rate → Control of sputter rate, film quality, and crystal structure → Control of ionization rate of target materials High-directionality film deposition → High-directionality film deposition characteristic of ion beam sputtering Multi-target mechanism → Wide-ranging multilayer film deposition Independent control of multiple targets → Co-sputtering alloy deposition by controlling the sputter rate of each target → Multilayer deposition by switching targets Conformal film deposition through bias application control to the substrate → Conformal film deposition even under adverse conditions such as deep trenches and overhangs.

  • Sputtering Equipment
  • Plasma Generator
  • Other surface treatment equipment

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High Rate Ion Beam Sputtering High-Speed Film Deposition System (HR-PVD)

High-rate and high-quality film formation of dielectric and ferromagnetic materials.

This is a high-speed ion beam sputtering (IBD) device that excels in the deposition of dielectrics such as Al2O3 and SiO2, which typically have low deposition rates in conventional magnetron sputtering, as well as ferromagnetic materials like Fe. By using a helicon plasma source as the ion source and a groundbreaking method that accelerates the high-density ions obtained from it through the application of bias voltage to the target, it achieves high-rate and highly directional film deposition. It also contributes to cost reduction in deposition processes using valuable and rare targets by efficiently utilizing the entire target surface. <Features> ■ High-speed, high-efficiency ion beam sputtering Optimal solution for dielectric and ferromagnetic targets ■ Helicon plasma ion source and target application Achieving both high-speed sputtering and low contamination Reduction of running costs through improved target utilization efficiency Maintenance reduction due to gridless structure Sputtering while keeping the substrate at low temperature through remote plasma configuration ■ Wafer processing Improved step coverage Composite film deposition using cluster tools ■ Excellent directionality Uniform film thickness can be achieved with a highly directional ion beam, resulting in excellent step coverage in film deposition.

  • Sputtering Equipment

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Related catalog(3)

Remote Plasma Ion Beam Sputtering "PlasmaQuest HiTUS"

Remote Plasma Ion Beam Sputtering "PlasmaQuest HiTUS"

PRODUCT
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Remote Plasma Deposition Equipment HiTUS System

Remote Plasma Deposition Equipment HiTUS System

TECHNICAL
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  • Catalog download

Contact this catalog

High Rate Ion Beam Deposition System HR-PVD

High Rate Ion Beam Deposition System HR-PVD

PRODUCT
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  • Catalog download

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ティー・ケイ・エス
Electronic Components and Semiconductors
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[Cast Iron Crack Repair] We repair cracks in metal products without applying heat.

  • NEW
  • COMPANY

The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact to the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Sep 13, 2025

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Casting prototype and casting repair.

  • NEW
  • COMPANY

The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without affecting the base material with heat. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Sep 12, 2025

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PFAS Regulation Countermeasures! ■■ Leak Test Equipment for Small Electronic Components|MSA-0101 series ■■ Does not use fluorinated inert fluids. PFAS-free. Offers accuracy equal to or better than liquid immersion testing.

  • NEW
  • PRODUCT

● This is a leak testing device for small electronic components that does not use fluorinated inert liquids (PFAS-free). ● There is no longer a need for unstable visual confirmation through liquid immersion testing. It adopts a quantitative testing method that allows for stable pressure leak testing. ● It is a tabletop leak testing device specifically for gross leaks, with accuracy equal to or greater than that of liquid immersion testing. ● The detectable range is approximately 1×10⁻² Pa·m³/s to 1×10⁻⁶ Pa·m³/s (varies depending on the target product). ● It is suitable for sealed structures ranging from a few millimeters to a maximum of 80 × 70 mm. Please feel free to contact us for more information!

Sep 12, 2025

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We have entered into a sales agency agreement with AC Tasarim and will commence sales in Japan.

  • NEW
  • COMPANY

On September 11, 2025, AC Tasarim, a cable blade manufacturer, and our company signed a sales agency agreement for Japan. This was also announced in the company's press release and on social media. Founded in Turkey in 2003, AC Tasarim manufactures flexible EMI cable shields (copper braid), polyester braid, meta-aramid braid (Nomex cable sleeves), flat copper braid busbars/ground braids, all AA59569-coded copper braids, and released AeroBraid in 2025, the world's lightest EMI braid. All manufactured copper braids are certified to military standards. AC Tasarim products hold key certifications including VDE/VG certification, German Federal Armed Forces certification, NATO NSN coding, AS9100 quality certification, and JOSCAR certification. Cable braids and EMI shielding products, essential for wire harnesses in the aerospace and defense industries, are becoming increasingly difficult to source as demand rises. TC Tasarim products are stocked by manufacturers and distributors to ensure quick response times.

Sep 12, 2025

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The carrier car "N-SELECT" will start accepting orders with a new lineup of five models!

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  • PRODUCT

Starting from September 22, 2025 (Monday), we will begin accepting orders for five new lineups tailored to various applications in the "N-SELECT" series of transport vehicles. In this new development, we will introduce the following five models that maintain the basic performance of the traditional N-SELECT while addressing more specialized needs: SC (Super Carrier) - Based on the traditional N-SELECT, this model is specialized for transporting immobile and accident vehicles. It is ideal for the automotive maintenance and towing industry. RC (Racing Carrier) - Designed with a gentle loading and unloading angle, this model is perfect for transporting sports cars and lowered vehicles. TP (Transporter) - A standard model optimized for the transportation of general passenger vehicles, suitable for a wide range of industries. ONE (Single Vehicle Loading Model) - A simple and efficient design dedicated to loading one vehicle. Recommended for small-scale transport and individual entrepreneurs. RS (Rescue) - A single vehicle loading model equipped with a crane, enhancing its capability to respond in accident scenes and tight spaces. With these lineups, N-SELECT evolves into a product group that meets a wider variety of on-site needs. We will continue to promote product development that reflects the voices from the field as the "preferred transport vehicle."

Sep 12, 2025

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  • PFAS規制に対応 PFASフリー コーティング剤 ・潤滑性を付与 摩擦低減、耐摩耗性向上 ・離型性を付与 撥水・撥油性、非粘着 など、多様の用途で提案が可能 素材は、金属・プラスチック・ゴムなど問いません!
  • 高品質×短納期 アキツなら金型費不要 0円 1個から対応可能 試作・小ロット 最短当日出荷 3Dデータ対応 ゴム切削加工はお任せください!
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