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  1. Home
  2. Industrial Electrical Equipment
  3. ヒロテック 東京営業所
  4. PSS (Patterned Sapphire Substrate) through wet etching is changing the LED industry!!
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  • Jan 23, 2013
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Jan 23, 2013

PSS (Patterned Sapphire Substrate) through wet etching is changing the LED industry!!

ヒロテック ヒロテック 東京営業所
About Patterned Sapphire Substrates (PSS) Using Wet Etching Currently, LED manufacturers have two completely different processes as options for their manufacturing processes. The dry etching method allows for the production of high-brightness, high-efficiency LEDs, but it requires a long time for manufacturing and has limitations on throughput. The wet etching method has a shorter manufacturing time and is highly scalable, but it cannot produce LEDs that are efficient or effective. However, in the case of the wet etching method, even when polishing and improving the wafer to enhance light extraction efficiency, significant cost reductions can be achieved compared to the dry etching method. Additionally, because it can scale up very efficiently, the cost reduction rate dramatically increases multiple times as throughput is increased and wafer sizes are expanded.
High-Temperature Quartz Bath for Sapphire Substrate Wet Etching "Xe-Series"
High-Temperature Quartz Bath for Sapphire Substrate Wet Etching "Xe-Series"
Etching pattern comparison
Etching pattern comparison
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Xe-Series.pdf[1150962]

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High-Temperature Etching Bath from IMTEC
Quartz bath for wet etching of sapphire substrates, high-temperature type "Xe-Series" ・Chemical temperature: up to 300℃ ・Liquid contact parts: all quartz ・Equipped with quartz aspirator for liquid discharge ・Equipped with recovery tank and emergency tank

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100586001.image_data.gif

High Purity Quartz Inline Heater

Uses high-purity quartz. An inline heater boasting high efficiency, long lifespan, and high reliability.

IMTEC, a company that has been providing cutting-edge wet process equipment in the semiconductor industry, confidently introduces AccuHeat, an inline heater made from high-purity quartz, boasting high efficiency, long life, and high reliability. Designed and manufactured based on over 20 years of experience, AccuHeat achieves high performance with low ownership costs and can be used in processes involving chemicals compatible with quartz. 【Features】 ◆ Inline heater using Inconel heater ◆ Exterior made of Teflon (PTFE) ◆ Does not reach high temperatures, eliminating the need for nitrogen purge and CDA cooling systems ◆ Excellent pressure resistance (4.2 Kg/cm²) ◆ Compact size; can be installed vertically or horizontally ◆ Available in 3KW and 6KW types ◆ 24-month warranty ◆ No maintenance required: no lamp replacement, mirror cleaning, or cooling system needed. ◆ Optimal heating: fast heating with precise temperature control without overshoot ◆ Compatible with various controllers; please contact us for more details.

  • Other heaters

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100586002.image_data.gif

Quartz Nitride Bus QN Series

We promise to provide the desired process control, ensuring that the boiling point of concentrated phosphoric acid is self-adjusted through refluxing in a safe, reliable, and rational manner.

◆ Accurate flow control and stable quantitative operation during manual/automatic operation are achieved through the combination of a pure water controller, quartz tank, condenser, and securely sealed lid. ◆ Consistent boiling point (acid concentration), stability for the next process, and smooth supply. ◆ The most effective, reliable, and stable system for Si3N4 etching (nitriding etching).

  • Other semiconductors
  • Etching Equipment

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SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

HF/KOH/solvent heating optimization SiC inline heater 【Features】 ○ Manufactured by IMTEC ○ Compatible with hydrofluoric acid and alkaline solutions (KOH, TMAH) ○ Uses SiC tubes ○ Direct attachment of the heater enables high-precision temperature control with optimal efficiency ○ The contact parts, made of SiC and PFA, prevent contamination compared to conventional heaters ○ Maintenance-free with no need for lamp replacement or CDA ○ Compact size ○ Can be installed vertically or horizontally ○ Space-saving design ○ Compatible with both circulation and single-pass processes ○ Diverse lineup ranging from 4.5 kW to 18 kW ● For other functions and details, please download the catalog.

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bath.jpg

Temperature Control Bus ACCUBATH

Temperature Control Bus ACCUBATH

UL Certification Obtained, SEMI S3 Compliant IMTEC Temperature Control Bus 【Features】 ○ UL Certification Obtained ○ Compliant with SEMI S3 ○ Equipped with high-efficiency Inconel heater ○ Maintains uniform temperature distribution within the bus through optimal thermal conduction at low temperature output ○ Achieves high precision temperature stability ○ No need for heater replacement, significantly improved MTBF ● For other functions and details, please download the catalog.

  • Thermostatic water bath

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Night Ride H for Quartz Night Ride Reflux System ACCUBATH

Night Ride H System Quartz Night Ride Reflux System ACCUBATH

Reliable and stable quartz nitride etching system 【Features】 ○ Achieves stable boiling point management with appropriate pure water supply ○ Achieves temperature control of ±0.2℃ ○ Extended lifespan due to cooling mechanism at the sealing part with Axia Seal™ (optional), with a 30-month warranty ○ The most effective, reliable, and stable system for Si3N4 etching (nitride etching) ● For other functions and details, please download the catalog.

  • Etching Equipment

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Xe-Series.jpg

Quartz bath for sapphire substrate etching ACCUBATH® Xe

Quartz bus developed for wet etching of sapphire substrates; the industry's first high-temperature compatible product usable up to 300°C.

Accubath® Xe is designed for etching sapphire substrates, but we believe there are processes that can achieve higher throughput by operating at higher temperatures. The long processes due to the previous temperature limits of the baths may no longer be practical. This module enables processes at ultra-high temperatures that were previously impossible. We can build systems to tackle new challenges and provide them to our customers. By adopting the Accubath® Xe series baths, we are confident that you will be able to safely and reliably produce the processes you desire.

  • Heating device
  • Temperature and Humidity Control
  • Other process controls

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Related catalog(3)

SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

PRODUCT
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Temperature Control Bus ACCUBATH

Temperature Control Bus ACCUBATH

PRODUCT
  • E-book viewing
  • Catalog download

Contact this catalog

Night Ride H for Quartz Night Ride Reflux System

Night Ride H for Quartz Night Ride Reflux System

PRODUCT
  • E-book viewing
  • Catalog download

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Industrial Electrical Equipment
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CCS3 product photo

The new product "Vehicle Count Sensor CCS3" enables efficient occupancy management of large parking lots.

  • NEW
  • PRODUCT

Hotron Inc. has launched its new product, the "Vehicle Count Sensor CCS3"! This product is a ceiling-mounted sensor that combines infrared and radar technology. It reliably detects vehicles in both directions with a single unit, accommodating traffic during congestion and vehicle passing, thus achieving efficient occupancy management in large parking lots. Additionally, it can be utilized for exit warning purposes in addition to vehicle counting, contributing to the safe and smooth operation of parking facilities. 'Features' - Improved detection performance against changes in road surface during rainy weather by using both infrared and radar. - Equipped with IP67 waterproof and dustproof performance, making it effective even in salt damage areas. - Various settings can be configured from a dedicated app (for Android devices), with current settings easily understandable at a glance. - The base dimensions are the same as the previous model "CCS2," allowing for smooth replacement of existing equipment. *For more details, please refer to the product information, catalog download, or contact us.*

Oct 08, 2026

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Hyper CLT flooring panel

Support for Okayama's baseball and challenges | Hyper CLT flooring × Masters Koshien

  • NEW
  • PRODUCT

The wooden lightweight sheet "Hyper CLT Sheet," utilizing CLT (Cross Laminated Timber), is a sponsor of the Masters Koshien (Okayama). The Masters Koshien is where those who have experienced high school baseball come together across generations to pursue their goals once again. We resonate with their "attitude of continuing to challenge" and support their activities from Okayama. The Hyper CLT Sheet is a product created to provide a new option in civil engineering sites, which have primarily relied on steel sheets until now. It is lightweight, easy to handle, and features the environmental value unique to wood. Furthermore, it is registered as a **Ministry of Land, Infrastructure, Transport and Tourism NETIS technology "TH-250021-A,"** aiming for widespread adoption in various sites, starting with public works. Wood, NETIS, civil engineering, CLT, wooden lightweight sheets. We will continue to support challenges in both the field and sports from Okayama. Masters Koshien (Okayama) https://masters-okayama.com/

Oct 08, 2026

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AAEON Intel Core Ultra Compatible Industrial Micro ATX【MAX-H810A】

  • NEW
  • PRODUCT

Features: ● Intel Core Ultra (Series 2) processor LGA 1851 socket (CPU sold separately) ● DDR5 6400MT/s dual-channel support, CU/U-DIMM x2 (up to 128GB) (memory sold separately) ● M.2 M-Key x1, E-Key x1 ● USB 3.2 x4, USB 2.0 x8 ● Intel Ethernet Controller I226-V (2.5GbE) x2 ● SATA 6Gb/s x2 (supports RAID 0 / 1 / 5) ● PCI Express Gen5 x16 x1, PCI Express Gen4 x4 x1, PCI Express Gen4 x1 x1 * This model does not include memory, storage, or OS.

Oct 08, 2026

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AAEON Q870 chipset equipped industrial Micro-ATX【MAX-Q870A】

  • NEW
  • PRODUCT

Features: ● Intel Core Ultra 200S series processor LGA 1851 socket (up to 125W) (CPU sold separately) ● DDR5 6400MT/s dual-channel compatible, CU-DIMM/U-DIMM x4 (up to 256GB) (sold separately) ● M.2 M-Key x2, E-Key x1, B-Key x1 ● USB 3.2 x8, USB 2.0 x6 ● 2.5GbE LAN x3 ● SATA 6Gb/s x2 (supports RAID 0 / 1 / 5) ● PCIe Gen5 x16 x1, PCIe Gen4 x4 x2, PCIe Gen4 x1 x1 ● Compatible with ATX power supply * This model does not include memory, storage, or OS.

Oct 08, 2026

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Jetway Intel Arrow Lake-S Compatible Industrial Mini-ITX【MTX-ARS2-H810】

  • NEW
  • PRODUCT

Features: ● Supports Intel Core Ultra 200S series processors with Intel H810 chipset and LGA1851 socket (up to 125W) (CPU sold separately) ● DDR5 CSO-DIMM x2 (up to 128GB) (memory sold separately) ● 2.5GbE LAN x2 ● HDMI x2, DisplayPort x1, LVDS/eDP x1 (supports simultaneous output of up to 3 screens) ● SATA 6Gb/s x4, M.2 M-Key x1, M.2 E-Key x1, M.2 B-Key x1, PCI Express Gen5 x16 x1 ● USB 3.2 Gen2 x2, USB 2.0 x8, RS-232/422/485 x1, RS-232 x5 ● Compatible with ATX power supply * This model does not include memory, storage, or OS.

Oct 08, 2026

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