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  6. Microscope XY Automatic Stage 【Case Study: Integration with Measuring Instruments】

Microscope XY Automatic Stage 【Case Study: Integration with Measuring Instruments】

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last updated:Oct 01, 2010

ファインシス
ファインシス
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I want to link various measuring devices with an XY stage to perform measurements of the entire workpiece.

**[Needs]** I want to obtain data for the entire workpiece using measuring instruments such as spectrometers, film thickness gauges, contact angle meters, and laser displacement meters. **[Improvement Example]** By linking various measuring instruments with an XY stage, automatic measurement of the entire workpiece will be performed. It is also easy to create I/O control programs for the measurement start output and end input of the measuring instruments. Even if the measurement target or measurement pitch changes, it can be quickly accommodated by simply changing the map shape. (The function for acquiring and saving measurement data will be required on the measuring instrument side.)

    Inspection fixtureOptical microscopeOther microscopes
measure_equipment.jpg

Microscope XY Automatic Stage 【Case Study: Integration with Measuring Instruments】

measure_equipment.jpg
measure_equipment.jpg
  • Related Link - http://www.finesys.jp/solution/index.html#case4

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【Needs】 I want to acquire data for the entire workpiece using measuring instruments such as spectrometers, film thickness gauges, contact angle meters, and laser displacement meters. 【Improvement Example】 By linking various measuring instruments with an XY stage, we can automatically perform measurements of the entire workpiece. It is also easy to create I/O control programs for the measurement start output and end input of the measuring instruments. Even if the measurement target or measurement pitch changes, we can quickly adapt by simply changing the map shape. (The function for acquiring and saving measurement data will be required on the measuring instrument side.)

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ファインシス

ファインシス

Testing, Analysis and Measurement

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We will assist in the "improvement" of research and development and manufacturing fields based on precision motion control and software technology.

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