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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. Transfer Rod (Z-φ Axis KTX Series)

Transfer Rod (Z-φ Axis KTX Series)

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KTX-500/KTX-750/KTX-1000

last updated:Sep 02, 2019

北野精機
北野精機
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【 Campaign for surpassing 4,000 units sold is underway 】 Our transfer rods use a magnetic system and are suitable for use in ultra-high vacuum environments.

This is an introduction device that transmits linear and rotational motion to samples and equipment in a vacuum from the atmospheric side. This product is recommended for transporting samples over long distances (500mm to 1000mm). Due to its magnetic mechanism, it achieves complete vacuum sealing with the outside and provides stable operation for a semi-permanent period. It can be applied to devices requiring linear and rotational motion installed in a vacuum. The interior of the main body is treated with electric field polishing, making it usable up to ultra-high vacuum regions. By using the stopper in the drive unit, positioning at any distance and angle is possible. As an option, a rotation stop mechanism and an extension handle can be installed. Additionally, there are specifications available for corrosive gas compatibility, so please consult us. <Common Specifications for All Three Models> Permissible leak rate: ≦1.33×10-11Pa·m3/sec Permissible heating temperature: ≦200℃ Straight pull force: 6kgf Rotational torque: 9kgf/cm Rotational angle scale: 16° Drive shaft diameter: φ16mm Connection flange size: ICF-114FH Drive method: Magnet ◎ For more details, please refer to the PDF document or feel free to contact us.

    CVD EquipmentSputtering EquipmentEvaporation Equipment
1_09-9-7-20cmKTX360.jpg

Transfer Rod (Z-φ Axis KTX Series)

1_09-9-7-20cmKTX360.jpg
1_09-9-7-20cmKTX360.jpg
  • Related Link - http://www.kitano-seiki.co.jp/shinkuukikibuhin/pro…

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basic information

<KTX-500> Stroke: 500mm, Weight: 5.5kg <KTX-750> Stroke: 750mm, Weight: 6.0kg <KTX-1000> Stroke: 1000mm, Weight: 6.5kg <Custom Order> Rod tip processing, stroke length change, surface treatment, baking treatment <Options> Motor drive unit, rotation stop unit, protector, extension handle

Price information

520,000 / 544,000 / 570,000 (excluding tax) *This is the campaign price until the end of March.

Price range

P4

Delivery Time

Please contact us for details

Applications/Examples of results

For more details, please refer to the PDF document or feel free to contact us.

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[Comprehensive Catalog] Vacuum Equipment and Parts

[Comprehensive Catalog] Vacuum Equipment and Parts

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Company information

北野精機

北野精機

Manufacturing and processing contract

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The history of Kitano Seiki is also a trajectory of continuous contribution to cutting-edge research fields through the provision of precision instruments for research and development. In November 1958, we were established as a company specializing in the design, manufacturing, and sales of precision instruments. Since then, we have developed and manufactured experimental equipment aimed at research institutes in universities and government agencies, as well as basic research laboratories in private companies, earning high praise for our excellent quality and reliability. In particular, in recent years, we have been at the forefront of ultra-high vacuum and ultra-low temperature technologies, which are essential in industrial fields such as new materials, nanotechnology, flat panel displays, high-temperature superconductivity, solar cells, nuclear power, and space development. We have accumulated abundant technology and know-how in creating experimental environments and have linked this to the development and provision of equipment that condenses advanced performance and functionality. At Kitano Seiki, we always work closely with researchers, our users, to design and develop equipment that accurately supports research and development objectives. With a consistent system from parts manufacturing to various processing, assembly, inspection and testing, equipment setup, and after-sales support, we provide high-quality products and a conducive experimental environment for quality research and development.

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