By using a dedicated chamber for rinsing and drying, precise cleaning is possible.
Set the cassette in the loader and transport the substrate using a chemical-resistant clean robot. Chemical processing is done in Chamber A, rinsing in Chamber B, followed by spin drying, and then the processed cassette is stored in the unloader. This is a single-wafer automatic multi-spin processor.
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basic information
The specifications of the swing arm allow you to choose two systems from various processing items such as chemical, brush, two-fluid jet, and megasonic for each chamber. It is possible to install two liquid supply tanks or waste liquid tanks (20L) on both sides of the main body. 【Features】 ■ Equipment Dimensions 2700W × 1500D × 2000H (200WCBT) 3000W × 1500D × 2000H (300WCBT) ■ Work Size Wafer φ4″ to φ8″ (300WCBT max φ12″) Mask □4″ to □6″ (same max □9″) ■ Options Work inversion mechanism FOUP loading port compatibility Reticle case compatibility SMIF POD compatibility Oriflow/notch alignment mechanism Ionizer Ozone water supply unit High-pressure pump unit Chemical supply unit Functional water supply unit Excimer UV unit Static eliminator □ For more details, please refer to the catalog.
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Company information
Kanamex Co., Ltd. has been engaged in the design and manufacturing of wet processing equipment related to photolithography in the semiconductor industry since its establishment. In today's electronics industry, particularly in the semiconductor front-end, advanced packaging technology, and FPD fields, there is an increasing demand for manufacturing processes that accommodate thinner, larger, and more advanced device substrates, as well as devices with higher functionalities, which require innovative manufacturing equipment. To meet the needs of the industry, our company is always alongside our customers, striving to improve customer satisfaction, maintaining a constant research and development mindset, and building innovative technologies to provide products and services that align with industry demands. We aim to conduct vibrant corporate activities as part of our management philosophy and will continue to work towards contributing to the development of society.