Heat and vaporize H2O, control the flow rate with a mass flow controller, and provide a stable supply to the etching equipment, ashing equipment, and conductive film process.
Bubbling N2 gas in the humidification tank, stable control with a mass flow controller, temperature control for process line baking, and stable supply to each furnace.
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basic information
【Features】 ○ Tank control temperature: 60–65℃ (Sensor PT100Ω) ○ Piping control temperature: 70–75℃ (Sensor PT100Ω) ○ Tank and piping temperature abnormality: 110℃ (Sensor thermoswitch) ○ There are two optical level sensors, H and M level, for detecting the water level in the H2O tank. ● For other functions and details, please contact us.
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Delivery Time
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Applications/Examples of results
【Purpose】 ○ Humidification unit ● For other functions and details, please contact us.
Company information
The current needs require us, on the supply side, to dig deeper in certain areas. Hughes TechnoNet believes that we are entering an era of development proposals where we actively present our unique technologies, cultivated across various industries, to our customers. The accumulated technology creates products, the development of those products leads to the next technology, and that technology further connects to the next advanced products... Hughes TechnoNet is poised to take flight with a vision of a new "challenge to creation," based on our accumulated fluid control technology.