Precision control of large-scale stages such as FPD and solar cell manufacturing.
Fine motion is used for precise control of large stages in FPD and solar cell manufacturing. With the increase in size and precision of stages, mechanisms for correcting yaw, sway, and perpendicularity have become important. Additionally, it is realized through precise motion control and a wealth of motion functions, including parallel axis (gantry) control, special multi-axis control, and head control synchronized with axis movements. It is suitable for FPD manufacturing equipment, solar cell manufacturing equipment, high-speed and high-precision stages, and high-speed laser processing machines. For more details, please contact us.
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basic information
【Features】 ○ Mechanism correction for large stages → Pitch error correction: Corrects errors in the direction of travel for each axis → Perpendicularity correction: Corrects errors in the perpendicularity of the axes → Yawing correction: Corrects errors caused by yawing of the axes → Wobble correction: Corrects lateral errors caused by wobbling of the axes ○ Measurement and setting support for mechanism correction values → Measure mechanism errors using laser measurement and set correction values → Support tools for "operation," "data measurement," and "conversion from measurement values to correction values" can be prepared ○ High-precision multi-axis control → nm control: Capable of speeds up to 1 m/sec (1 Gpps) in 1 nm increments → Control cycle: 0.5 msec for 6 axes (1 msec for 14 axes) → Minimum continuous interpolation: 0.5 msec for 6 axes (1 msec for 9 axes) Fine and precise multi-axis synchronized control every 0.5 msec ○ Convenient features for high-precision stage control → Multi-axis control: Control of up to 16 axes → Parallel axis control: Same-axis drive with multiple motors for gantry structures or large stages Same command for 2 axes (standard option), 3 or more axes possible (customized) → Pre-interpolation acceleration/deceleration: Automatically decelerates or accelerates according to the acceleration at corners to improve trajectory accuracy ● For more details, please contact us.
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Applications/Examples of results
【Applications】 ○ Large stages for semiconductor manufacturing ○ Solar cell manufacturing ○ FPD manufacturing ○ Large processing machines with gantry structures ● For more details, please contact us.
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Company information
Techno has consistently developed and sold "motion controllers" for over 35 years since its founding. Our greatest mission is to enable the more flexible use of advanced NC technology. To achieve this, we have realized "the openness of NC technology," "downsizing (miniaturization and minimal hardware)," and "a wealth of precise motion functions." Thanks to this, our products are used in over 600 themes and tens of thousands of devices. *These include precision machining machines (cutting, grinding, polishing, milling, boring, discharge, laser, water jet, etc.), winding machines, unwinding machines, industrial robots, 3D printers, pipe benders, spring manufacturing, film rolls, inspection devices, and more. We believe that our products, technology, know-how, and experience will continue to contribute to customers aiming for world-class top-level equipment.