[Analysis Case] Evaluation of Composition and Impurity Distribution of ZnO Films by SIMS
Visualization of in-plane distribution through imaging SIMS analysis.
The uniformity of the film composition and the distribution of impurities, which are one of the elements in device creation, were evaluated using imaging SIMS analysis. Through data processing after measurement, we can obtain planar images (Figure 1), cross-sectional images (Figure 2), depth distribution profiles at arbitrary locations (Figures 3 and 4), and line profiles. From the distribution of constituent materials and impurities, we can gain information that leads to process and film quality improvements.
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Analysis of optical devices and solar cells.
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