Small wafer chuck, high precision control!! From room temperature to -200℃!
In the heating process of semiconductor wafers, we will match the interface to the equipment you have as various evaluation tables.
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basic information
◎ Small wafer chuck with high precision control (±1.0%). Consultation available for even higher precision types. ◎ Low-cost, thin wafer hot chuck. ◎ Wide range of temperature settings possible (room temperature to -200℃) using a temperature controller (sold separately). ◎ Custom specifications with various additional features such as positioning pins and wafer size switching levers.
Price information
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Applications/Examples of results
In the heating process of semiconductor wafers. Additionally, we will match the interface to your existing equipment as a table for various evaluations.
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Company information
We invite production engineers and manufacturing staff to visit the MSA Factory website, which provides strong support!