Ultra-high sensitivity DLTS system / Bulk defect and interface level measurement device
Supports high-sensitivity measurement of bulk internal defects at a level of 108 cm3 and interface states (DLS-1000). Additionally, it comes standard with a library for easy analysis. 【Features】 ● Capable of high-sensitivity contamination detection (2x108 atoms/cm3). ● Equipped with a wide range of interfaces for cryostats. ● Capable of measurements such as temperature, frequency scans, and C-V characteristics. ● Easily profiles depth direction, distribution of traps, and identification of elements and defects, making it effective for analyzing defects and crystal imperfections. (By comparing measurement results with the list of DLTS signals of contaminants in the library, contaminants can be easily identified.) ● High-sensitivity analog/digital system (measurements are analog, data processing is digital) with a unique system employing lock-in averaging method and user-friendly software. ● Over 100 units delivered worldwide, demonstrating extensive delivery experience.
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basic information
Main Measurement and Evaluation Items - Maximum sensitivity measurement: C=2x10-5pF for S/N=1 (when variable during temperature and frequency scanning) - Trap density: Nt＜10-5INd-Na) - I-V/C-V plot - Capture cross-section measurement - Electric field dependence measurement - Trap depth measurement - Mos measurement
Price information
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Delivery Time
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Applications/Examples of results
Main measurement and evaluation items - Maximum sensitivity measurement: C=2x10-5pF for S/N=1 (when variable during temperature and frequency scans) - Trap density: Nt＜10-5INd-Na) - I-V/C-V plot - Capture cross-section measurement - Electric field dependence measurement - Trap depth measurement - Mos measurement
Line up（1）
| Model number | overview |
|---|---|
| DLS-1000 |
Company information
Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.
