It is a cassette-to-cassette type wafer edge automatic inspection machine.
It is a cassette-to-cassette type wafer edge automatic inspection machine. It achieves a high throughput with a 10-second inspection time per wafer and a 30-second takt time. A robot takes out one wafer at a time from a cassette that holds 25 wafers, performs automatic alignment, inspects it, and then stores it back in the cassette. The operation is simple.
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【Features】 1. Simultaneous inspection of three edges 2. Defect and foreign object identification function 3. Optimal lighting achieved with triple optical system and integrated illumination 4. Full inspection including the orifice area 5. Full wafer imaging and defect review file function ◎ You can view detailed specifications and more by downloading the catalog. If you are interested, please download and check the catalog.
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We will collaboratively think about and manufacture prototypes, automatic machines, and online machines for inspection equipment that supports the manufacturing and development of new technologies, tailored to your ideas and requests. We provide everything from the design and manufacturing maintenance of hardware, optical systems, and software for ordered products to after-sales service.
