Contamination removal was achieved with the same effect as ultra-mirror polishing of the wafer.
There was an inquiry regarding the removal of contamination from press-cut products. The issue was that the contamination generated during the deburring process was strongly adhered to the products, and some of it could not be removed even after passing through a cleaning device. It was mentioned that a neutral detergent was being used, so a small OK nozzle OKE-MB07FJ (20L/min) was employed. The cleaning solution containing neutral detergent in the 500L tank was initially cloudy, making it difficult to determine the generation of microbubbles. Therefore, experiments were conducted by varying the air suction volume, and the optimal suction volume for cleaning was selected, resulting in the same effect as during the ultra-polishing of wafers. In this cleaning process as well, microbubbles burst due to showering and brushing, and it seems that the destructive power of these bubbles enabled effective peeling cleaning. The method for generating microbubbles involves using a submersible pump within the 500L tank. For more details, please contact us or refer to the catalog.
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【Features】 ○ Contamination removal with the same effect as ultra-polishing of wafers ○ Use of a small OK nozzle OKE-MB07FJ (20L/min) ○ Conducted experiments by varying the air suction volume to select the optimal suction volume for cleaning ○ Microbubbles burst due to showering and brushing, providing a powerful cleaning effect through their destructive force ○ The method for generating microbubbles involves using a submersible pump in a 500L tank ● For more details, please contact us or refer to the catalog.
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Our main business is the design of specialized machine tools for processing automotive parts and similar items. We have been researching microbubbles since 2000. In 2006, we developed a loop flow microbubble generation nozzle. We applied for a patent, which was published in May 2008. Since spring 2008, we have been supplying a special type to a company that sells ozone microbubble shower devices. General sales began in 2009.