Flow stabilizes in less than 1 second after setting input! High precision and high reliability metal seal model!
The "Aera FC-R7800 Series" is a system that not only performs high-precision flow control but also features excellent airtightness due to its metal seals. It is suitable for major gas control applications. Thanks to advancements in technology, such as the incorporation of highly sensitive and fast-response small sensors, it demonstrates excellent controllability. 【Features】 ■ Corrosion-resistant design ■ Metal seal adoption ■ VCR and Swagelok compatible connections ■ Full-scale flow range from 10 sccm to 200 slm ■ Normally closed or normally open solenoid control valves *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Specifications (Partial)】 ■ Full scale range: 10 sccm to 5 slm ■ Response time: Less than 1 second (0 to 100% ±2% Typical) SEMI E17-91 ■ Accuracy: Within ±1% of full scale ■ Linearity: Within ±0.5% of full scale ■ Repeatability: Within ±0.2% of full scale *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Semiconductor manufacturing processes, various inspection/analysis equipment, internal combustion engines, film deposition devices, fuel cells, liquid crystal displays, optical fibers, organic EL, environmental measurement, bio, food.
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Company information
We specialize in the development, manufacturing, sales, and import/export of fluid control equipment, providing products tailored to our customers' needs and offering the latest information. As a company, we will implement meticulous services that are fundamentally expected but have been difficult to achieve, leveraging the strong network of our group. - Obtained ISO 13485 certification.