High-precision rubber seals with excellent cost-effectiveness.
In the markets for semiconductors, FPD, data storage devices, industrial vacuum equipment, industrial coatings, and others, applications using non-corrosive gases are being developed, including CVD, PVD, etching, ion implantation, sputtering, thermal oxidation films, optical glass coatings, optical fibers, surface treatments, and other coating processes. The FC-R7700 series supports the smooth operation of process and equipment engineers with high reliability and excellent performance.
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basic information
Features - High-speed response ─ Flow stabilizes in less than 2 seconds after setting value input - Elastomer (rubber) seal - Connections compliant with VCR, VCO, and Swagelok standards - Full-scale flow range from 10 sccm to 200 slm - Normally closed or normally open solenoid control valve - External leak rate of less than 1x10^-7 Pa·m³/sec (He)
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In markets such as semiconductors, FPD, data storage devices, industrial vacuum equipment, and industrial coatings, applications include the use of non-corrosive gases, as well as processes such as CVD, PVD, etching, ion implantation, sputtering, thermal oxidation films, optical glass coatings, optical fibers, surface treatment, and other coating processes.
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Thank you for your continued support. Since our establishment as Tokiko Pressure Gauge Co., Ltd. in 1964 through a joint investment by Tokiko Co., Ltd. (now Hitachi Automotive Systems, Ltd.) and Nagano Keiki Co., Ltd., we have continuously grown across a wide range of fields, including general industrial equipment, railway vehicles, office supplies, home appliances, medical devices, and infrastructure-related industries, and we have celebrated our 50th anniversary thanks to your support. In 2015, while centering on the products of Hitachi Automotive Systems, Ltd. and Nagano Keiki Co., Ltd., we transformed into Hitachi Automotive Systems & Nagano Co., Ltd. as a member of the Hitachi Group, aiming to create a safe, secure, and comfortable living environment and to challenge all industries, products, and services. Moving forward, in addition to our core products, we will strive to be a trusted comprehensive distribution company by expanding our trading company functions and enhancing our engineering capabilities, and we will work hard to propose systems that meet your satisfaction. We kindly ask for your continued strict guidance and warm support.