Next-generation PI technology! Mass flow controller compatible with IGS method that is less affected by pressure.
The "Aera PI-980" is a pressure-sensitive type mass flow controller developed in anticipation of the growing demand for next-generation semiconductor manufacturing processes. With excellent flow stability, it enhances process reproducibility between chambers and improves production yield. Additionally, it has been verified for accuracy with real gases and supports multi-gas and multi-range applications. 【Features】 - Capable of pressure-insensitive control (less affected by pressure) - High measurement accuracy and reproducibility - Compatible with IGS method - Verified for accuracy with real gases, supports multi-gas and multi-range - Programmable in the field *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Other Features】 ■ DeviceNet, RS-485, Analog Control ■ Equipped with a display ■ Built-in self-diagnostic function ■ 100% metal seal, high purity specification *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Semiconductor manufacturing processes, various inspection/analysis equipment, internal combustion engines, film deposition devices, fuel cells, liquid crystals, optical fibers, organic EL, environmental measurement, bio, food.
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Company information
We specialize in the development, manufacturing, sales, and import/export of fluid control equipment, providing products tailored to our customers' needs and offering the latest information. While these services are fundamentally expected from a company, they have often been difficult to realize. We will implement these detailed services through the strong network of our group. - Obtained ISO 13485 certification.
