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  6. Ultrasonic Single Component Concentration Meter (Semiconductor) FUD-1 Model-13

Ultrasonic Single Component Concentration Meter (Semiconductor) FUD-1 Model-13

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last updated:Dec 10, 2019

富士工業
富士工業
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A model featuring a compact cell-type oscillator for semiconductor manufacturing processes.

The FUD-1 Model-13 retains its advantages such as maintainability and high-precision inline measurement, while featuring a compact cell-type transmitter designed for semiconductor manufacturing processes. The speed of sound in the chemical solution varies based on the concentration and temperature of the solution, and this concentration meter accurately measures the speed of sound and temperature within the solution. Based on this speed of sound and temperature information, it calculates and outputs the concentration using the calibration curve recorded in the built-in data ROM. For more details, please contact us or refer to the catalog.

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model-13(セル型).jpg

Ultrasonic Single Component Concentration Meter (Semiconductor) FUD-1 Model-13

model-13(セル型).jpg
model-13(セル型).jpg
  • Related Link - http://www.fuji-us.co.jp/products/keisoku/semicon_…

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【Features】 ○ Real-time concentration measurement is possible, making it easy to build a concentration management system. ○ Standard equipped with analog DC 4-20mA and digital RS232C. ○ Standard equipped with measurement error output and alarm output. ○ Standard equipped with self-diagnosis function and error message display. ○ Compact and lightweight cell-type transmitter can be directly installed on the line. ○ Liquid-contact materials made of PFA and low output design have no impact on chemicals. ○ Continuous measurement with high precision is possible. ○ No need for regular adjustments or calibrations, maintenance-free. ○ No need for various adjustments during installation, making it easy to set up. ○ Feedback to the process is also easy with real-time output. ● For more details, please contact us or refer to the catalog.

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Applications/Examples of results

【Applications】 ○ Management of CMP slurry or oxidant concentration in the CMP process, etc. ○ Management of various chemical concentrations in the dilution process (such as H2O2, TMAH, HNO3, H2SO4, HCl, etc.) ○ Management of cleaning solution concentration in the cleaning process (such as HF, NH4OH, KOH, IPA, etc.) ○ Management of etching solution concentration in the etching process (such as HF, H2SO4, etc.) ● For more details, please contact us or refer to the catalog.

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[Semiconductor Selection] Ultrasonic Liquid Concentration Meter for Single Component FUD-1 Model-13/130

[Semiconductor Selection] Ultrasonic Liquid Concentration Meter for Single Component FUD-1 Model-13/130

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富士工業

富士工業

Testing, Analysis and Measurement

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Since our establishment in 1976, we have developed products specialized in ultrasonic application technology and have brought them to the world. Although ultrasonic technology may be unfamiliar to many, we believe there are still many unknown aspects, and its range of applications is limitless. Our corporate philosophy is to "create value through ultrasonic technology and share that value with our customers." We are committed to delivering high-value-added products to our customers in a timely manner, contributing to their satisfaction and joy. We appreciate your continued support.

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