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  6. Ultra-precision positioning piezo stage with PK opening type, X-axis

Ultra-precision positioning piezo stage with PK opening type, X-axis

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last updated:May 24, 2023

THKプレシジョン
THKプレシジョン
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A type with an opening (transparent hole) in the center of the movable table. It is suitable for fine observation and high-precision mapping measurements when combined with microscopes and analytical instruments.

This is a type of PK opening piezo stage for the X-axis with ultra-precise positioning. We offer strokes of 30μm and 100μm. It is suitable for laser transmission, fine observation combined with microscopes and analytical instruments, and high-precision mapping measurements. ■ High-speed, high-precision scanning operation Thanks to the high responsiveness of the piezoelectric elements and closed-loop control using built-in displacement sensors, positioning can be achieved with high speed, high resolution, and high reproducibility. In small ranges, it provides faster and more reliable operation compared to stepping motor stages. ■ User-friendly interface The control controller allows for the selection of both analog and digital input interfaces, enabling easy position commands from a computer. It supports not only point-to-point movement but also continuous reciprocating motion like raster scanning and arc motion that describes a perfect circle. We also accommodate requests for special environments (such as vacuum and non-magnetic), so please feel free to consult us. *For more details, please download the materials or feel free to contact us.

    Other machine elements
nanocontrol_pkxjiku.jpg

Ultra-precision positioning piezo stage with PK opening type, X-axis

nanocontrol_pkxjiku.jpg
nanocontrol_pkxjiku.jpg
  • Related Link - https://www.thkprecision.co.jp/product/piezo/42

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【Features】 ○ Type with an opening (transparent hole) in the center of the movable table ○ Ideal for fine observation and high-precision mapping measurements when combined with microscopes and analytical instruments ○ High-speed, high-precision scanning operation ○ User-friendly interface ○ Compatible with special environments (vacuum, non-magnetic, etc.) 【X-axis Stage Product Lineup】 ○ PK1L60-030U → Stroke: 30nm → Resolution: 1nm → Repeatability: ±1nm → Resonant frequency: 1700Hz → Body size: 70×60×16nm ○ PK1L45-100U → Stroke: 100nm → Resolution: 2nm → Repeatability: ±52nm → Resonant frequency: 230Hz → Body size: 45×45×20nm *For more details, please download the materials or feel free to contact us.

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Applications/Examples of results

Scanning Probe Microscope Microscope Sample Stage Spectroscopic Analysis Equipment Semiconductor and FPD Related Equipment Exposure Equipment Mapping Measurement

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THKプレシジョン

THKプレシジョン

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Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.

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