This is a new silicon wafer edge polishing device developed with the concept of space-saving and high throughput.
● High throughput polishing is possible without selecting wafers ● Improved processing surface accuracy ● Chemical-free polishing is possible ● Removal of various films is possible ● Can be introduced into each process of wafer manufacturing
![poli_photo01[1].jpg](https://image.mono.ipros.com/public/product/image/c3e/2000126285/IPROS32036122745567517176.jpeg?w=280&h=280)
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basic information
In the wafer manufacturing process, the silicon wafer edge polisher that enables improved throughput and surface accuracy has been globally adopted. The silicon wafer edge polishers compatible with 6-inch, 8-inch, and 12-inch wafers use precision polishing tape, and thanks to our patented technology, they can always polish with a new abrasive surface, ensuring stable polishing power.
Price information
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Delivery Time
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Applications/Examples of results
Silicon wafer edge polishers can be utilized for various applications. They are used in each manufacturing process of silicon wafers (after beveling, after etching, and for CVD film removal). They are also effective for reclaim applications and the removal of various metal films.
Company information
Since our establishment, we have accumulated technology and know-how as a precision polishing manufacturer in the semiconductor and liquid crystal industries. Leveraging that know-how, we supply precision polishing equipment not only for metal precision polishing but also for semiconductor wafer polishing, compound semiconductor polishing, semiconductor and liquid crystal panel polishing, shaft polishing, sample polishing, and other industries. Being a Japanese product, and specifically made in Wakayama Prefecture, we offer specifications that cater to specific needs. Because we handle design, electrical, materials, manufacturing, and sales all in-house, we can flexibly accommodate custom specifications. In addition, in our control division, we provide maintenance and equipment modifications for existing customer equipment, as well as PLC replacements, utilizing the technology developed through our equipment development. We are dedicated to a customer-first philosophy, striving to improve without being confined to our own designed equipment or specific fields. If you have any polishing concerns, please reach out to IMT first.