It features an energy-saving design using a full-axis stepping motor.
The SSCR2090S series of super clean room two-axis cylindrical coordinate clean robots is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. Each axis retains the specifications of higher-end models, including encoders, latch-type solenoid valves, and pressure switches with digital displays. For more details, please contact us or refer to the catalog.
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【Features】 ○ The SSCR3115S-150-PM is compatible with unit interchangeability and can be modified to link arm specifications or Z-axis specifications. ○ Load capacity: Equivalent to 0.1 kgf or less at the third joint of the arm (workpiece only). ○ Equipped with a motion monitor. ○ Control method: RS232C and parallel photo I/O. ○ All axes use two-phase stepping motors. ○ High-speed and high-precision transport of wafers through S-curve acceleration and deceleration control. ○ Wafer holding: Vacuum suction and drop-in. ○ Chuck materials can be various, including CFRP, aluminum, and ceramics. ○ Can accommodate optimal chucks tailored to the transported objects and equipment layout. ● For more details, please contact us or refer to the catalog.
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