It is possible to reduce processing costs by simplifying the shape of chamfer processing.
The 5-axis vacuum horizontal multi-joint clean robot GTVHR5000 series can accommodate a variety of device layouts. It contributes to the reduction of footprint and vacuum chamber volume, enabling cost reduction in processing through simplified chamber shapes. It allows access to parallel stages, making it ideal for inline layout. For more details, please contact us or refer to the catalog.
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【Features】 ○ Arm variations: 281mm, 330mm ○ Z-axis variation: 60mm ○ Load capacity: 4kgf or less equivalent to the third joint of the arm ○ Magnetic fluid seals used at the arm joint ○ Vacuum seal: magnetic fluid seals and bellows used ○ Cleanroom compatible: equipped with a 5μm mesh filter for arm exhaust ○ Adoption of inch chuck reduces wafer exchange time ○ Operating monitor equipped ○ Control method: RS232C and parallel photo I/O ○ All axes use AC servo motors ○ S-curve acceleration and deceleration control enables high-speed and high-precision wafer transport ○ Wafer holding: drop-in and edge grip chuck ○ Chuck materials can be various, including CFRP, aluminum, ceramics, etc. ○ Can accommodate optimal chucks tailored to the transported items and equipment layout ● For more details, please contact us or refer to the catalog.
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