Support for transport requiring positioning of wafers (silicon, GaAs, glass).
The optical aligner SAL4381 series is designed for the positioning of wafers (silicon, GaAs, glass) in semiconductor manufacturing equipment and inspection devices that require precise alignment. It achieves high-speed and high-precision centering and alignment of silicon wafers. A 0.1μm filter is equipped on the spindle side. The control method is via RS232C and parallel photo I/O. Options are available for compatibility with GaAs wafers and glass as well. For more details, please contact us or refer to the catalog.
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**Features** - Supports the transport of wafers (silicon, GaAs, glass) that require positioning within semiconductor manufacturing equipment and inspection devices. - High-speed, high-precision centering and orientation of silicon wafers. - Cleanroom compatible: Equipped with a 0.1μm filter on the spindle side. - Control method: RS232C and parallel photo I/O. - Optional support for GaAs wafers and glass. **Specifications** - Transported items: 3-inch, 100-200mm silicon wafers. - Positioning time: Centering: 5 seconds. - Positioning accuracy: Centering: within ±0.3mm; Orientation locate: within ±0.3 degrees. - Sensor: Transmissive LED sensor. - Size switching: Switching via command control or communication. - Cleanliness: 0.1μm Class 1 (during exhaust of the drive unit). - Drive method: 2-phase stepping motor, 4 axes used; motor driver and controller built-in. - Utility: Power supply: DC24V 2A; Vacuum: -53kPa or more. For more details, please contact us or refer to the catalog.
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