The wafer carrier can be fully cleaned with chemicals.
Rapid heating is possible! This high-purity quartz bath can reach temperatures up to 190°C. The USL quartz static bath is ideal for semiconductor, electronics, LCD (organic EL, inorganic EL), chemical experiments, diffusion, and etching processes. It is made of pure transparent quartz (99.99% silica) and can rapidly heat up to 190°C. It allows for complete chemical cleaning of wafer carriers. 【Features】 ○ Safety-designed temperature controller ○ Accurate temperature control ○ Uniform temperature distribution (within ±0.5°C) ○ Excellent heat and chemical resistance (UL safety standard approved) ○ Both inner tank and exterior are highly durable molded products For more details, please contact us or download the catalog.
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basic information
【Specifications】 ○Container material: Pure transparent quartz (99.99% silica) ○Exterior material: Flame-retardant polypropylene ○Temperature range: 30 to 190℃ ○Temperature uniformity: Within ±1℃ of set temperature ○Cord length: 3m 【Product Lineup】 ○00V-079-01: Number of ports 2, Wafer size 4, Liquid volume 11L ○00V-079-02: Number of ports 2, Wafer size 5, Liquid volume 14L ○00V-079-03: Number of ports 1, Wafer size 6, Liquid volume 10L ○00V-079-04: Number of ports 2, Wafer size 6, Liquid volume 18L ○00V-079-05: Number of ports 1, Wafer size 8, Liquid volume 25L ○00V-079-06: Number of ports 2, Wafer size 6, Liquid volume 34L ○00V-079-07: Number of ports 2, Wafer size 6, Liquid volume 51L ●For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Pre-cleaning for diffusion process (RCA cleaning) ○ Etching process ○ Resist stripping (sulfuric acid or solvent type) ○ Manufacturing and cleaning of glass masks ● For more details, please contact us or download the catalog.
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Company information
This is a product that meets the comfortable environment required by research and development sites. Universal Corporation continues to provide fluoropolymer products that can accommodate advanced clean environments, cleanroom products that meet high cleanliness level requirements, and static electricity control products.
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