Both plasma and thermal ALD film deposition are possible.
High Tech Systems is the sales agent for Veeco/CNT, a global leading company in ALD (Atomic Layer Deposition) equipment. Veeco/CNT is the ALD (Atomic Layer Deposition) division of the US-based Veeco company, engaged in advanced ALD technology development, and is the manufacturer of the most widely used development and pilot production ALD equipment in research institutions, universities, and companies worldwide. They also have a proven track record in the market for production ALD equipment and large-area substrate ALD equipment, and they respond to customer requests.
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basic information
Hi-Tech Systems supports the introduction of products and technologies from Veeco/CNT, a global leading company in ALD atomic layer deposition equipment! ● High Performance - Capable of both plasma and thermal ALD film deposition - Chambers developed specifically for ALD film deposition, with improved exhaust mechanisms - Equipped with chamber turbo pumps and ALD Vapor Traps as standard ● User-Friendly - Many options including load-lock mechanisms, ozone generators, and glove box connections - Operating system using LabVIEW - Improved operation screen with an easy-to-understand operating system - Provision of standard recipes - Expanded types of film deposition For more details about this ALD equipment, please feel free to contact us.
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Applications/Examples of results
ALD technology contributes to a wide range of fields such as semiconductors, flat panel displays (FPD), MEMS, lighting, and medical applications by forming thin films with excellent protective properties and no defects.
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