Reduction of maintenance load and compactization of volume achieved by a double-structured chamber. Our thermal solutions are consolidated to achieve optimal temperature management.
Equipment for experiments and research and development provided by Watty. We offer devices ranging from 2-inch to 8-inch models to meet user needs. Additionally, we provide various optional ancillary equipment to reduce the burden of equipment installation for our customers. We can accommodate customization requests for all aspects, including safety specifications, the number of precursors, precursor introduction methods, and exhaust systems. *For more details, please refer to the PDF materials or feel free to contact us. ▼ Contact Information TEL: Sagamihara Office 042-704-5352 MAIL: info@watty.co.jp
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basic information
【Option Examples】 - Exclusion equipment for process exhaust - Support from manual handling to automatic transport systems - Purifier for inert gases - Selection of precursor bottle sizes - Customization according to customer specifications - Low-cost ALD device specifications also available 【Device Overview】 - Achievable pressure (during process): ≦7Pa - Film formation temperature: 400℃ (600℃ compatible heater under development) - Basic configuration size: 2160×890×1940 mm - Maximum number of precursors: 5 【Film Formation Application Examples】 Supports various film types including Al₂O₃, TiO₂, HfO₂, ZrO₂, SiO₂, Ta₂O₅, TiN, Si₃N₄, and others. 【ALD Contract Film Formation Service】 We offer contract film formation using ALD equipment within our Sagamihara business unit. We assist with film formation using the desired precursors. We cater to all needs, including live demonstrations with customer presence, comparative evaluations based on desired recipes and parameters, and post-film evaluation services. We also accommodate regular small-lot contract production, so please feel free to inquire.
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Applications/Examples of results
Various types of contract film formation We provide film formation equipment tailored to customer requests through various customizations. We have a track record of implementation in research institutions and similar organizations.
Company information
Our company (formerly known as Keihin Sokkiki Co., Ltd.) was reborn as Watty, Inc. on January 1, 2007, marking our 40th anniversary. The company name combines "watt," a familiar unit of power associated with our main manufacturing division, the Thermal Systems Division (which develops, manufactures, and sells heater units used primarily in semiconductor and FPD manufacturing equipment and various precision instruments), and "water," representing the liquid typically sensed by our other main division, the Sensor Division (which focuses on the development, manufacturing, and sales of liquid level sensors). Thus, we chose the name Watty to reflect these two pillars.
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