Thermal ALD equipment "Savannah G2"

For research and development, for small-scale batches! Standard equipped with a simple decontamination unit ALD Shield Vapor Trap.

The "Savannah G2" is a flexible thermal ALD device that is simple and easy to use, capable of supporting everything from research and development to small-scale mass production. It achieves high film deposition performance with a simple system, and configurations can be selected according to applications and budgets. Please feel free to contact us if you have any inquiries. 【Features】 ■ Achieves high film deposition performance with a simple system ■ Ultra-high aspect ratio (less than 2000:1) compatible mode ■ Configuration selection based on applications and budgets ■ Precursor lines: up to 6 lines ■ Simple exhaust unit: ALD Shield Vapor Trap standard equipped * For more details, please refer to the PDF materials or feel free to contact us.

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