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  6. Plasma/Thermal Dual-Use ALD Equipment

Plasma/Thermal Dual-Use ALD Equipment

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Fiji G2

last updated:Dec 28, 2022

ハイテック・システムズ
ハイテック・システムズ
  • Official site

Both plasma and thermal ALD film deposition are possible.

High Tech Systems is the sales agent for Veeco/CNT, a global leading company in ALD (Atomic Layer Deposition) equipment. Veeco/CNT is the ALD (Atomic Layer Deposition) division of the US-based Veeco company, engaged in advanced ALD technology development, and is the manufacturer of the most widely used development and pilot production ALD equipment in research institutions, universities, and companies worldwide. They also have a proven track record in the market for production ALD equipment and large-area substrate ALD equipment, and they respond to customer requests.

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Plasma/Thermal Dual-Use ALD Equipment

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  • Related Link - https://www.hightec-sys.com/mems/veeco.html

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basic information

Hi-Tech Systems supports the introduction of products and technologies from Veeco/CNT, a global leading company in ALD atomic layer deposition equipment! ● High Performance - Capable of both plasma and thermal ALD film deposition - Chambers developed specifically for ALD film deposition, with improved exhaust mechanisms - Equipped with chamber turbo pumps and ALD Vapor Traps as standard ● User-Friendly - Many options including load-lock mechanisms, ozone generators, and glove box connections - Operating system using LabVIEW - Improved operation screen with an easy-to-understand operating system - Provision of standard recipes - Expanded types of film deposition For more details about this ALD equipment, please feel free to contact us.

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Applications/Examples of results

ALD technology contributes to a wide range of fields such as semiconductors, flat panel displays (FPD), MEMS, lighting, and medical applications by forming thin films with excellent protective properties and no defects.

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Leading successful used equipment implementation with high technical expertise - Rebate Technology Services Company Profile

Leading successful used equipment implementation with high technical expertise - Rebate Technology Services Company Profile

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Engineering technology that connects advanced overseas systems with customer needs.

Engineering technology that connects advanced overseas systems with customer needs.

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Company information

ハイテック・システムズ

ハイテック・システムズ

Industrial Machinery

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Our company website features information on used equipment related to FPD and semiconductors. ● Main Business Activities Purchase of used semiconductor manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for semiconductor manufacturing lines Purchase of used FPD manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for FPD manufacturing lines Contract development, manufacturing, and sales of semiconductor manufacturing equipment and FPD manufacturing equipment Sales of various equipment parts Agency sales of overseas manufactured equipment

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