Small film-forming device! It can simultaneously accommodate three types of targets.
The Multi-Target Compact Coater SVC-700TMSG/Adexcel is a small film deposition device that generates plasma through direct current discharge using a magnetron cathode in a low vacuum environment. It sputters a metal target attached to the cathode with ions in the plasma, creating a thin film on the sample surface. Since three types of targets can be mounted simultaneously, it allows for target selection in a vacuum, enabling the production of multilayer films. 【Features】 ○ Three types of targets can be mounted simultaneously ○ Targets can be selected in a vacuum, allowing for the production of multilayer films ○ Optional attachments include a film thickness sensor and a sample heating unit ○ The exhaust device's upper part can be replaced with a resistance heating unit, and a dedicated power supply can be connected → Can also be used as a resistance heating vacuum evaporation device For more details, please contact us or download the catalog.
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【Specifications】 ○Discharge Type: DC Magnetron ○Discharge Control: Constant Current 30mA ○Pressure Control: Manual control using a needle valve ○Process Time: Maximum 15min/Timer Control ○Process Gas: Ar (Introduction Pressure below 0.1MPa) ○Process Gas Inlet: Φ6mm Quick Coupling (for Sinflex Tube) ○Target Size: Φ49mm, t0.5mm (maximum) ○Number of Target Mounts: 3 types ○Applicable Targets: →Au, Pt, Au-Pd, Pt-Pd, Ag, Pd, W, Ni, Mo, Cr, Ti, Al, Cu, Fe ○Sample Size: Maximum Φ50mm ○Sample Selection: Stage Rotating Type ○Distance between Target and Sample (TS): 20mm, 30mm, 40mm ○Target Selection: Shutter Method ○Power Supply Method: Independent Power Supply Switching Type (Power Panel Operation) ○Exhaust System: Turbo Molecular Pump (TMP) 67L/s (N2), Oil Rotary Pump (RP) 20L/min ○Achievable Vacuum: Below 1×10⁻³Pa ○Vacuum Measurement: Combination Type Vacuum Gauge (Ion Vacuum Gauge + Pirani Vacuum Gauge) ●For more details, please contact us or download the catalog.
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The management philosophy is to "pioneer the future of research and development with core technology." Our motto is to provide those involved in research and development with what they need at the right time, while enhancing the "expandability of device functions" and offering a "variety of options." Additionally, leveraging our "agility," we strive daily to meet the diverse needs of our customers.