New 450mm aligner compatible with notchless wafers.
High-speed and high-precision positioning based on the outer circumference of a 450mm silicon wafer and the T7 code or notch. Utilizes a uniquely developed image sensor, with a motor driver and controller built into the main unit. Compatible with changes in spindle shape and material. Control method: RS232C and parallel photo I/O. A type that can accommodate both 450mm and 300mm wafers can also be manufactured. A version with a Z-axis capable of wafer re-gripping operation can also be produced.
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basic information
○Transported Item: SEMI standard 450mm silicon wafer (T7 code specification, notch specification) ○Positioning Accuracy: Centering: within ±0.1mm Locating: within ±0.1 degrees ○Positioning Time: within 4 seconds ○Sensor: Wafer edge detection using image sensor unit ○With LED lighting ○Position Correction Range: within a radius of 8mm ○Wafer Holding Method: Holding by vacuum suction ○Cleanliness: ISO Class 2 (during exhaust of drive part) ○Mass: Approximately 18kg ○Utility: Current Voltage: DC24V±10% 3A Vacuum: -53kPa or higher
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
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