It contributes to the miniaturization of the transport department.
Industry's smallest class, enabling miniaturization of equipment. Our standard atmospheric robot: 75% footprint reduction (□115x130mm), 80% volume reduction. Arbitrary reach distance settings are possible through arm combinations.
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basic information
Robot Specifications Robot Model: TSCR3060N-135-PM Transported Object: 2-inch silicon wafer Wafer Holding Method: Vacuum suction holding method Mechanical Structure Type: Cylindrical coordinate type Control Axes: 3 axes Motor Type: Encoder-equipped 2-phase pulse motor Operating Range: Arm (R-axis) ±119mm, Swing Angle (θ-axis) 360 degrees, Vertical Stroke (Z-axis) 135mm Transport Speed: Arm (R-axis) 230mm/sec, Swing Angle (θ-axis) 450 degrees/sec, Vertical Stroke (Z-axis) 170mm/sec Repeatability: Within ±0.1mm Cleanliness: ISO Class 2 (during drive unit exhaust) Utility: Current Voltage: DC24V±10% 4A, Vacuum: -70kPa or more Mass: Robot body approximately 4kg Controller Specifications Controller Model: C4301 Series Interface: RS232C and Parallel Photo I/O This specification represents the typical specifications of the TSCR3060N-135-PM. It may vary depending on the transported object and chuck shape.
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."