Wafer aligner
Supports transportation requiring wafer positioning in semiconductor manufacturing equipment and inspection devices. Achieves a compact footprint for small-diameter wafers. Centers small-diameter wafers and positions the orientation flat and notch quickly and accurately.
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basic information
Transported Item: 100.4mm Sapphire Wafer (only first orifice specification) / Thickness less than 1mm (no warping) Positioning Time: Orifice search within 5 seconds (if no re-gripping) Positioning Accuracy: Centering: within ±0.2mm Orifice locate: within ±0.3 degrees Sensor: Red LED transmission sensor Wafer Holding Method: Edge grip method using wafer grip arms Cleanliness: 0.1µm/cf Class 1 (during exhaust of drive section) Drive Method: Small stepping motors used for each axis (motor driver is built-in) Utility: Power supply: DC24V±10% 2A
Price range
Delivery Time
Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
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