Optimal for the deposition of optical multilayer DBR films for LEDs!
Sapio-DBR (SGC-S1550i/S1300i series) is a vacuum deposition device specialized for optical multilayer DBR films for LEDs, offering good uniformity within the dome and enabling improved production efficiency. It is optimal for the deposition of optical multilayer DBR films for LEDs. 【Features】 ○ Excellent mass production performance → Substrate capacity: Approximately 400 pieces of φ2 inch wafers/batch Approximately 110 pieces of φ4 inch wafers/batch → Cycle time: Within 3 hours/batch → Required installation area: W4.6m × D6.3m × H3.2m * When using SGC-S1550i * Removal of the ceiling panel on the factory side may be necessary when attaching or detaching the quartz film thickness gauge. ○ Excellent reproducibility, continuous batch guarantee also available ○ Film quality adjustment is possible; we can assist with condition correction to suppress film damage due to chipping. For more details, please contact us or download the catalog.
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basic information
【Standard Equipment】 ○ Ultra-high-speed exhaust system ○ EB-GUN x2 ○ RF ion source ○ Fiber optic film thickness gauge ○ 6-channel quartz film thickness gauge ○ Halogen heater (120℃±5℃) ● For more details, please contact us or download the catalog.
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Applications/Examples of results
Optical multilayer DBR film for LED use ● For more details, please contact us or download the catalog.
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Company information
Showa Vacuum Co., Ltd. manufactures and sells vacuum technology application devices (vacuum equipment) such as vacuum deposition devices and sputtering devices, primarily focused on equipment that forms thin films on specific substrates in a vacuum.