Electromagnetic scanner type (patented) allows for damage-free and non-destructive measurements at a low cost. It has functions equivalent to expensive AFM.
Even beginners can achieve accurate measurements! You can measure non-destructively just by setting the sample! There is a lineup ranging from handheld types to fully automatic measurements with cassettes. 【Product Features】 - Ultra-compact with a depth and width of 15cm, easy to carry anywhere - Evaluation and demo units available for loan. Rich measurement inspection track record - Achieves low cost while having functions comparable to expensive AFMs - By using an electromagnetic scanner (patented) for scanning, there is no need to move the substrate - Does not use piezo elements commonly used in AFMs, so there is no nonlinear creep or aging changes - Can measure without damage and non-destructively - AFM carbon nano-probes (high resolution, long lifespan) 【Software Applications】 - Fine line width measurement - Surface shape measurement of silicon and compound wafers - Surface inspection of quartz glass - Mask pattern measurement - Surface inspection and evaluation after polishing and CMP - Thin film step measurement, continuous and discontinuous measurement during film formation - Observation of magnetic fields in hard disks - Film surface inspection - High-precision surface analysis of metal molds - Evaluation of optical components and precision parts
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basic information
Even beginners can achieve accurate measurements! You can measure non-destructively just by setting the sample! We offer a lineup ranging from handheld types to fully automatic measurements with cassettes. 【Product Features】 - Ultra-compact with a depth and width of 15 cm, easy to carry anywhere - Evaluation and demo units available. Extensive measurement and inspection track record - Achieves low cost while having functions comparable to expensive AFMs - By using an electromagnetic scanner (patented) for scanning, there is no need to move the substrate - Does not use piezoelectric elements commonly used in AFMs, so there is no nonlinear creep or aging changes - Can measure without damage and non-destructively - AFM carbon nanoprobes (high resolution, long lifespan) 【Software Applications】 - Fine line width measurement - Surface shape measurement of silicon and compound wafers - Surface inspection of quartz glass - Mask pattern measurement - Surface inspection and evaluation after polishing and CMP - Thin film step measurement, continuous and discontinuous measurement during film formation - Observation of magnetic fields in hard disks - Film surface inspection - High-precision surface analysis of gold molds - Evaluation of optical components and precision parts
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Applications/Examples of results
【Measurement Test Examples】 - IC Pattern - SI Wafer - Biochip - GaN Wafer - Quantum Dot - Numerous other measurement examples 【Device Specifications】 High Resolution Specifications 1. Maximum Scanning Range: 10μm 2. Maximum Z Range: 1.8μm 3. Z Direction Resolution: 0.027nm 4. XY Direction Resolution: 0.15nm 5. Nonlinearity: <0.6% 6. Noise Level: 0.04nm Wide Area Scanning Specifications 1. Maximum Scanning Range: 110μm 2. Maximum Z Range: 22μm 3. Z Direction Resolution: 0.34nm 4. XY Direction Resolution: 1.7nm 5. Nonlinearity: <0.6% 6. Noise Level: 0.3nm
Company information
We provide manufacturing equipment sales, proposals, and services unique to a "technical trading company" that has design know-how and contract/manufacturing partners. We have accumulated achievements through experiments and development with optimal selections tailored to our customers' needs. We will continuously develop new innovative technologies and applied technologies. We offer high-value-added proposals that encompass equipment sales, contract rental services, and consumable parts sales.
