ブルーオーシャンテクノロジー Product Lineup

Supports a wide range of production technologies for wafer-level CSP, TAB, COF, etc. - Excellent in-plane uniformity, capable of forming thin films and thick films at levels from 50nm to 100μm. - Coating examples: precise coating on thin films, thick films, uneven surfaces, and through holes. - We also sell equipment and conduct experiments and contract testing, so we can make proposals tailored to your applications and environments. 【Non-Contact Coating Equipment】 This coater allows for non-contact bulk coating of circular substrates such as wafers and disks without wasting coating liquid. It can handle high-viscosity liquids and thick films, which are difficult to coat with spin coaters. 【Precision Spray Coating Equipment】 Easily achieves coating on various substrates using a spray method. Spray coating samples can be produced easily with minimal materials. It accommodates a wide variety of workpieces, materials, and processes, including uneven substrates, thick films, and organic materials.

• Coater

【Features】 - Short delivery times - Capable of handling small lots - Total solutions provided by experienced technicians - We flexibly respond to customer needs through joint development, prototype processing, and custom orders for small lots. 【Equipment Lineup】 - Cleaning - Roll-to-roll cleaning - Spin cleaning - Hydrocarbon cleaning - Vacuum drying - Coating - Slit coater - Spin coater - Roll coater - Spray coater - Surface treatment - Atmospheric pressure plasma treatment - Excimer UV irradiation - UV curing equipment - Laminating and bonding - Laminator - Bonding equipment - Hot press - Vacuum press - Auxiliary equipment and measuring instruments - Non-contact film thickness gauge, optical microscope, spectroscopic ellipsometer, contact angle meter, SEM-EDX, contact angle meter, and others. *If you have any requests for tests using other equipment, please feel free to contact us.

• Coater

【Device Features】 Board Size: MAX 370×470mm Temperature Range: MAX 200℃ Hot Plate GAP: 0.3mm (Proxy Type) Main Applications and Examples - Universities, research and development institutions, AIST, material and materials development, precision parts, optical parts - Pharmaceutical research applications, precision mold parts for automobiles, cosmetics, electronic devices, semiconductors, liquid crystals

• Coater

【Conveyor System】 Total support from loaders and unloaders of various process equipment to standalone devices and entire lines. Capable of manufacturing up to MaxG10 size. Maintains a clean environment through non-contact transmission using magnetic gears, the adoption of anti-static rollers, and optimization of airflow. 【Robot System】 Promoting automation and labor-saving in manufacturing sites through integrated production from design to manufacturing and robot teaching. We listen to customer requests and current situations to propose a total system that optimizes the entire manufacturing line. 【Roll-to-Roll Conveying Line】 Achieving high-precision winding and conveying of "wide," "long," and "ultra-thin" films! We propose automatic winding and conveying machines compatible with various products such as LCD films, packaging films, and high-functionality films. We can also accommodate materials other than films, such as metal foils, paper, and new materials, so please consult with us. We design and manufacture unwinding and winding sections of process equipment tailored to customer needs. Tension (1-100N) and automatic conveying at low and high speeds are possible. Conveying is performed without causing scratches, wrinkles, or damage to the base material. Dual-side cleaning process treatment is possible through edge support conveying.

• Touch Panel
• Conveyor

【Device Lineup】 Slit coater, spin coater, dip coater, tabletop coater 【Features of the Coater】 - Capable of handling substrate sizes from 10mm□ to G8. - A coater with high coating precision and excellent uniformity for film thicknesses ranging from thin to thick (approximately 1 to 500μm). - Available for evaluation using various test machines. - Maintains and improves uniformity of coating from low viscosity to high viscosity (a few cp to 5,000 cp). - Designed and manufactured according to customer applications and environments. 【Test Target Substrates, Workpieces】 - Glass: Substrate sizes from 10mm□ to G6 - Wafers: 2 inches to Φ300mm - Functional films: MAX 400×500mm Coating materials, viscosity - Various chemicals: resist, ink, paste, resin-based - Viscosity: a few cp to 5,000 cp - Film thickness: 1 to 500μm 【Main Applications, Examples】 - Universities, research and development institutions, National Institute of Advanced Industrial Science and Technology - Semiconductors, LCDs, organic EL, touch panels - Functional films - Material and material development - Precision parts, optical parts - Pharmaceutical and cosmetic research applications

• Coater

**Advantages of Rental** - Difficult to introduce equipment - When existing equipment breaks down - When an excimer UV device is urgently needed - Want to reduce maintenance, upkeep, property tax, and management costs - New equipment introduction possible: Please consult separately **Features** - High brightness and high uniformity due to high-intensity RF discharge method - Direct irradiation on the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit even in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Adjustable illuminance for each lamp - Effective lamp length: up to MAX G10 size **Electrode-less Irradiation Unit & N2 Slit Holder Structure** The lamp structure does not have electrodes on the irradiation surface side, resulting in no obstruction of light and minimal transmission or reflection losses, making it highly efficient. Nitrogen (CDA) is ejected along the lamp tube wall from individual lamp holders. This efficiently generates ozone and allows for uniform control of oxygen concentration with a small amount. **Main Applications** - Cleaning and surface modification of glass, films, and wafers - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubricant hardening - Resist removal and ashing - Cleaning of chip, film, and substrate bonding surfaces

• Coater

**Features** We will fully support our customers' technology and prototype development. By leveraging our technical skills, proposal capabilities, and proactive approach in coating, printing, and laminating, we aim to become a reliable and trustworthy business partner for our customers. 1. We can process substrates from 10mm square to G8. 2. To meet our customers' needs, we flexibly respond with joint development, prototype processing, and custom orders in small lots. 3. We also offer sales and rentals of testing equipment, providing proposals tailored to our customers' applications and environments. **Target Substrates and Workpieces** Glass: 10mm square to G8 size Wafers: Φ2 inches to Φ300mm Functional films: MAX 400×500mm Optical lenses, precision small parts, etc. **Coating Materials and Viscosity** - Various chemicals: resist, ink, paste, resin-based, etc. - Viscosity: from a few cp to 10,000 cp - Film thickness: 1 to 100μm **Main Applications and Examples** - Universities, research and development institutions, AIST, material and material development, precision parts, optical components - Pharmaceutical research applications, precision mold parts for automobiles, cosmetics, electronic devices, semiconductors, liquid crystals

• Coater

**Features** - High brightness and high uniformity due to high-intensity RF discharge method - Direct irradiation on the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit even in a vacuum environment - Significant reduction in nitrogen usage due to a unique slit holder - Adjustable illuminance for each lamp - Effective lamp length: up to MAX G10 size **Electrode-less Irradiation Unit & N2 Slit Holder Structure** The lamp structure does not have electrodes on the irradiation surface, resulting in no obstruction of light and minimal transmission or reflection losses, leading to high efficiency. Nitrogen (CDA) is ejected along the lamp tube wall from individual lamp holders. Ozone is generated efficiently, allowing for uniform control of oxygen concentration with a small amount. **Main Applications** - Surface modification for cleaning glass, films, and wafers - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubrication oil curing - Resist removal and ashing - Cleaning of chip, film, and substrate bonding surfaces **Examples of Equipment Installation** - Pre-cleaning equipment for G8 size TFT substrate film formation - Roll-to-roll cleaning equipment - Resist ashing equipment

• Coater

Design and manufacture of unwinding and rewinding sections of process equipment tailored to customer needs. Tension (1-100N) and automatic transport at low and high speeds are possible. Transport is carried out without causing scratches, wrinkles, or damage to the substrate. Both-sided cleaning process treatment is possible through end-face support transport. Case Studies: Functional films, organic EL, liquid crystal devices, secondary batteries. Target Substrates: Functional films, PEN, PET, etc. Equipment Installation Examples: Unwinding and rewinding units for defect inspection equipment. Unwinding and rewinding units for exposure equipment. Unwinding and rewinding units for film deposition equipment. Unwinding and rewinding units for printing equipment.

• Touch Panel

Features - Short delivery time - Capable of handling small lots - Total solutions provided by experienced technicians - Precision coating that pursues uniformity in application - Rental of spin coaters is also available, allowing us to propose solutions tailored to your applications and environment. Target substrates and workpieces - Glass: 10mm□ to 200mm□; 400×500mm - Wafers: Φ2 inches to Φ300mm - Functional films: MAX 400×500mm - Optical lenses, precision small parts, etc. Coating materials and viscosity - Various chemicals, resists, resin-based materials, etc. - Viscosity: a few cp to 10,000 cp - Film thickness: 1 to 100μm Main applications and examples - Universities, research and development institutions, National Institute of Advanced Industrial Science and Technology (AIST), material development, precision parts, optical components - Pharmaceutical research applications, precision mold parts for automobiles, cosmetics, electronic devices, semiconductors, liquid crystals Various equipment - Clean booth (installed within a clean room) - Slit coater - Tabletop spin coater Φ500 series (compatible with inner cup method) - Tabletop spin coater Φ300 series - Hot plate - Film thickness measurement device

• Coater

【Device Specifications】 ・ Board Size: φ10～150mm□ Board ・ Board Transfer Method: Manual Set/Reset ・ Device Weight: Approximately 22Kg 【Unit Configuration】 ・ Cup Outer Diameter: φ300mm ・ Cup Material: SUS + Polished #400 ・ Cup Treatment: Optional Teflon Coating (Inner surface of cup & inner cup) ・ Board Fixing Method: Vacuum Suction Method ・ Table: Optional *Please consult for size and material separately ・ Spin Motor: AC Servo Motor ・ Rotation Speed: MAX 9000rpm (depending on board size and thickness) ・ Rotation Accuracy: ±2rpm ・ Rotation Display: Digital display on touch panel ・ Rotation Control: Set via touch panel

• Coater

【Device Specifications】 ・ Board Size: φ4 to 250mm square board ・ Board Transfer Method: Manual set/reset ・ Device Weight: Approximately 48Kg 【Unit Configuration】 ・ Cup Outer Diameter: φ500mm ・ Cup Material: SUS + Polished #400 ・ Cup Treatment: Optional Teflon Coating (Inner surface of cup & inner cup) ・ Board Fixing Method: Vacuum suction method ・ Table: Optional *Please consult for size and material separately ・ Spin Motor: AC servo motor ・ Rotation Speed: MAX 6000rpm (depending on board size and thickness) ・ Rotation Accuracy: ±2rpm ・ Rotation Display: Digital display on touch panel ・ Rotation Control: Set via touch panel

• Coater

Industry first! Rental-only spin coater Contract processing (film formation and coating) also available Supported substrate sizes (MAX): 250mm□ and 300mm wafers Target workpieces: glass substrates, silicon wafers, films Rental period: 15 days to over 1 year Options available for table production, automatic supply lines, etc. Compact, tabletop type

• Coater

More than 100 chemical wet stations for electronic devices such as semiconductor devices, MEMS, LCD, organic EL, and touch panels have been delivered. Demo units and evaluation systems are fully equipped.

• Other semiconductor manufacturing equipment

- Functional films, organic EL research film modification device - Compatible with films of width 200 to 300 mm - Capable of left-right reciprocating transport with a normal pressure plasma generation device in the center - Option to select guide film insertion or protective film alignment winding mode - Transport speed of 0.1 to 1 m/min (actual achievement of 4 m/min)

• Other semiconductor manufacturing equipment

In recent years, we have successfully commercialized not only laminating machines but also slitting and cutting machines, as well as automated machinery. We provide integrated production from design to manufacturing. We have manufactured numerous processing and production machines to date. We also accept custom-made line consultations for customers, not limited to laminating. Additionally, we have dozens of machines for test processing, allowing for repeated experiments to select models and functions. Please feel free to consult with us.

• Other semiconductor manufacturing equipment

It is possible to make the processing section compact through dip treatment using low-speed conveyance. This can significantly reduce the amount of pure water used and the footprint.

• Other semiconductor manufacturing equipment

After manufacturing the SHAFT and ROLLER, or after assembling the SHAFT and ROLLER, we conduct an inspection process to provide high-quality products. There is an urgent need for the development of new concepts for shafts due to the increasing demands for larger and higher-resolution FPDs and cost reduction in manufacturing. We are producing shafts that are lighter, eliminate bending, and minimize runout. These are commonly used in the semiconductor field, PDP, LCD manufacturing equipment, chemical equipment, food equipment, precision machinery industry, and printed circuit board industry. For more details, please download the catalog or contact us.

• shaft
• Food Conveyor Equipment

We accept orders starting from low-cost, small lots (1 piece). These are resin bearings that can be manufactured in sizes ranging from JIS standards to special sizes. We have a proven track record of supplying to the food, automotive, and electronics industries. Please feel free to request a quote or contact us. For bearings used in special environments, we produce them by combining various special materials such as plastics, ceramics, PEEK, and fluororesins for the inner and outer rings, retainers, and rolling elements to ensure they can be used under special environmental conditions. For more details, please download the catalog or contact us.

• Other machine elements
• Plastic bearings
• Metal bearings

We accept orders starting from low-cost, small lots (1 piece). These are PEEK bearings that can be manufactured in special sizes from JIS standards. We have numerous delivery records to the food, automotive, and electronics industries. Please feel free to request a quote or inquire with us. These bearings are made from high-performance thermoplastic materials that exhibit excellent heat resistance, corrosion resistance, self-lubrication, radiation resistance, smoke resistance, and mechanical properties. Product Features: 1. Excellent heat resistance (continuous use temperature of 200°C) 2. Superior corrosion and solvent resistance 3. Excellent self-lubrication and outstanding wear resistance even without oil or grease supply 4. Exceptional mechanical properties (high tensile and bending strength) 5. Excellent radiation resistance 6. Superior electrical properties Product Specifications: Deep groove ball bearings, angular contact bearings, thrust bearings, self-aligning ball bearings *For more details, please request our materials.

• Other machine elements

We accept orders starting from low-cost, small lots (1 piece). These are resin bearings that can be manufactured in special sizes from JIS standards. We have a proven track record of supplying to the food, automotive, and electronics industries. Please feel free to request a quote or inquire. They are made from Fine ceramic materials that possess characteristics such as corrosion resistance, heat resistance, non-magnetic properties, lightweight, and insulation, making them suitable for special environmental fields where conventional steel (SUT2) bearings are difficult to use. Product Features: 1. Corrosion Resistance: Usable in strong acids, alkalis, and seawater. 2. Heat Resistance: No change in hardness or strength even at high temperatures. 3. Non-Magnetic, Insulating: Usable in magnetic fields and prevents electrical generation. 4. Lightweight: Lighter than general bearings. 5. High Strength: Hardness and longitudinal elastic modulus are higher than bearing steel. 6. High-Speed Rotation: The rolling elements (balls) are light, reducing centrifugal force during rotation. Product Specifications: Deep groove ball bearings, angular contact bearings, thrust bearings, automatic self-aligning ball bearings. *For details, please request materials.

• Other machine elements

This is a magnet made using anisotropic NdFeB rare earth particles, utilized as a non-contact drive gear in the transport systems within the manufacturing processes of the pharmaceutical, food and beverage, LCD, organic EL, and semiconductor industries, particularly in clean environments. We offer various types depending on the number of units, inner and outer diameters, and fixing methods. For more details, please download the catalog or contact us.

• Other conveying machines
• Food Conveyor Equipment
• Sealing

The need for the development of new shaft concepts driven by demands such as the large-scale, high-definition, and cost reduction of FPDs is rapidly increasing. We are manufacturing shafts that are lighter, eliminate flex, and minimize wobble. Types of shafts: 1. CFRP + SUS 2. CFRP + PVC 3. CFRP Pipe 4. CFRP Round Bar Product features: 1. Realization of weight reduction due to the large scale of FPDs 2. Manufacturing capabilities with delivery records up to G10 size 3. CFRP (24T/65T) 4. Unlike other makers, we manufacture the entire shaft process in-house 5. Also sold as assembled products with shafts and transport rollers. *For details, please request materials.

• Other conveying machines
• Other cleaning machines
• shaft