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  1. Home
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  4. Semiconductor Manufacturing Equipment
  5. Coater
  6. Coating equipment for MEMS and semiconductor packages

Coating equipment for MEMS and semiconductor packages

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last updated:Feb 08, 2017

ブルーオーシャンテクノロジー
ブルーオーシャンテクノロジー
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We provide optimal coating systems for various mounting processes, including cutting-edge MEMS and semiconductor packaging processes.

Supports a wide range of production technologies for wafer-level CSP, TAB, COF, etc. - Excellent in-plane uniformity, capable of forming thin films and thick films at levels from 50nm to 100μm. - Coating examples: precise coating on thin films, thick films, uneven surfaces, and through holes. - We also sell equipment and conduct experiments and contract testing, so we can make proposals tailored to your applications and environments. 【Non-Contact Coating Equipment】 This coater allows for non-contact bulk coating of circular substrates such as wafers and disks without wasting coating liquid. It can handle high-viscosity liquids and thick films, which are difficult to coat with spin coaters. 【Precision Spray Coating Equipment】 Easily achieves coating on various substrates using a spray method. Spray coating samples can be produced easily with minimal materials. It accommodates a wide variety of workpieces, materials, and processes, including uneven substrates, thick films, and organic materials.

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Coating equipment for MEMS and semiconductor packages

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basic information

【Spinless Coating Device】 - Device Specifications Maximum Coating Size: Φ450mm Usable Coating Liquid Viscosity: 1 to 50,000 mPa·s Coatable Film Thickness: 1 to 500μm Coating Speed: 5 to 50mm/sec Film Thickness Accuracy: Within ±3% 【Precision Spray Coating Device】 - Device Specifications Maximum Coating Size: 10mm□ to G5 size Nozzle Type: Rotating Atomization Nozzle, Low-Pressure Atomization Nozzle Nozzle Rotation Speed: Max 55,000rpm Nozzle Pressure: Max 0.5Mpa Coatable Film Thickness: 50nm to 100μm Film Thickness Accuracy: Within ±3%

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Applications/Examples of results

【Coating Examples and Main Applications】 1. Uneven substrates: Substrates that cannot be handled by spin or slit methods 2. Ultra-thick films: Related to MEMS, solar cells, and polyimide materials 3. Ultra-thin films: Organic materials, photoresists, photocatalysts, protective films 4. Carbon materials, fluorescent materials, cylindrical substrates, flexible substrates, substrates with through holes, etc. 【Coating Methods】 1. Spinless coating equipment 2. Precision spray coating equipment 3. Dip coating equipment

Company information

ブルーオーシャンテクノロジー

ブルーオーシャンテクノロジー

Industrial Machinery

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We provide manufacturing equipment sales, proposals, and services unique to a "technical trading company" that has design know-how and contract/manufacturing partners. We have accumulated achievements through experiments and development with optimal selections tailored to our customers' needs. We will continuously develop new innovative technologies and applied technologies. We offer high-value-added proposals that encompass equipment sales, contract rental services, and consumable parts sales.

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