The installation position is flexible! A compact-sized combined molecular pump with an integrated controller!
The TG60F turbo molecular pump with grease-lubricated bearing is a compact size with an integrated controller. Its installation orientation is flexible, allowing for greater freedom in equipment design. It is ideal for applications such as electron gun evacuation, analytical instruments, and research and development. 【Features】 ■ Rapid vent stop capability. ■ Strong structure against atmospheric intrusion. ■ Compliance with safety standards: NRTL/SEMI-S2/CE (only for TG60F-20) *For more details, please contact us or download the catalog to view.
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basic information
【Features】 ■Flexible installation position ■Compact size ■Energy-saving ■Rapid startup ■Rapid vent stop capability ■Strong structure against atmospheric entry ■High compression ratio ■Integrated controller ■Safety standard compliance: NRTL/SEMI-S2/CE (only for TG60F-20) 【Standard Set】 Pump + Connector for Controller
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Delivery Time
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Applications/Examples of results
Semiconductor manufacturing, FPD (LCD, PDP, organic EL, FED, etc.) manufacturing, various electronic component manufacturing, tube manufacturing, optical component (lenses, optical filters, etc.) manufacturing, electron gun evacuation, ion source evacuation, heat treatment, surface treatment, surface modification, analysis and testing equipment, accelerators, synchrotron radiation facilities, nuclear fusion research, research and development, and others.
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Company information
We provide our customers with reliable products that can be used with peace of mind, satisfaction, and for a long time! Osaka Vacuum is committed to offering vacuum equipment that satisfies our customers by setting four major goals: "Customization," "Advanced Safety Measures," "Future-Oriented," and "Customer Support System," and we are dedicated to realizing and further deepening these goals.
