This is a device for storing φ300 mm wafers, which have completed processing, one by one into a Teflon cassette for submersion.
The wafer is placed onto the wafer shuttle by the operator using a suction pad after being processed by the equipment, and then it is slid into the Teflon cassette for storage by utilizing the tilt of the stage and the discharge of pure water.
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basic information
- When the wafer is stored in the Teflon cassette, it automatically descends to a position where the next wafer can be stored. - The Teflon cassette can hold 4 pieces. - It can store 4 cassettes in two rows on the left and right, but there is also an option to store 2 cassettes in a single row.
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Applications/Examples of results
We have received orders from the semiconductor industry.
Company information
☆Dedicated Semiconductor Website Now Open!! https://www.wafer-measurement-inspection.com/ At Justem Co., Ltd., we design, manufacture, and sell automation and labor-saving machines for the wafer manufacturing process, including non-contact thickness measurement machines for wafers, wafer thickness sorting machines, automated lapping and polishing machines, and wafer transfer machines, targeting materials such as Si, SiC, and sapphire, through our unique technology development. We have provided these to many customers. We also design, manufacture, and sell specialized machines for electronic component processing and automotive parts processing. We also accept demo measurements for thickness measurement of various materials.