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  6. Excimer UV device (handheld type)

Excimer UV device (handheld type)

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last updated:Dec 12, 2016

ブルーオーシャンテクノロジー
ブルーオーシャンテクノロジー
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Ultra-compact handheld excimer UV device Body weight: 3.8kg Dimensions: W320×D260×H180mm Demo unit available for loan

Ultra-compact handheld excimer UV device Main unit weight: 3.8 kg Dimensions: W320 × D260 × H180 mm Demo units available for loan 【In-house experimental machine specifications】 - Maximum experimentable size: 600 × 700 mm - Lamp intensity: 50–140 mW - Number of lamps: 5 - Stage transport speed: 0.5–5.8 m/min - Atmosphere utilities: N2, CDA, ambient air - Clean room: Class 10,000 - Measurable with contact angle meter 【Features】 - High intensity and uniformity due to high-intensity RF discharge method - Direct irradiation from the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Intensity adjustment possible for each lamp - Effective lamp length: up to MAX G10 size 【Main applications】 - Surface modification cleaning of glass and films - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubrication oil curing - Resist removal and ashing

    Coater
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Excimer UV device (handheld type)

1448607298.jpg
1448607298.jpg

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Ultra-compact handheld excimer UV device Main unit weight: 3.8 kg Dimensions: W320 × D260 × H180 mm Demo units available for loan 【In-house experimental machine specifications】 - Maximum experimental size: 600 × 700 mm - Lamp intensity: 50–140 mW - Number of lamps: 5 - Stage transport speed: 0.5–5.8 m/min - Atmosphere utilities: N2, CDA, ambient air - Clean room: Class 10,000 - Measurable with contact angle meter 【Features】 - High intensity and uniformity due to high-intensity RF discharge method - Direct irradiation on the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit even in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Intensity adjustment possible for each lamp - Effective lamp length: Up to MAX G10 size 【Main applications】 - Surface modification cleaning of glass and films - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubricant curing - Resist removal and ashing

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Ultra-compact handheld excimer UV device Main unit weight: 3.8 kg Dimensions: W320 × D260 × H180 mm Demo unit available for loan 【In-house experimental machine specifications】 - Maximum experimental size: 600 × 700 mm - Lamp intensity: 50–140 mW - Number of lamps: 5 - Stage transport speed: 0.5–5.8 m/min - Atmosphere utilities: N2, CDA, ambient air - Clean room: Class 10,000 - Measurable with contact angle meter 【Features】 - High intensity and uniformity due to high-intensity RF discharge method - Direct irradiation from the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamp can be lit in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Intensity adjustment possible for each lamp - Effective lamp length: up to MAX G10 size 【Main applications】 - Cleaning and surface modification of glass and films - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubricant curing - Resist removal and ashing

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ブルーオーシャンテクノロジー

ブルーオーシャンテクノロジー

Industrial Machinery

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We provide manufacturing equipment sales, proposals, and services unique to a "technical trading company" that has design know-how and contract/manufacturing partners. We have accumulated achievements through experiments and development with optimal selections tailored to our customers' needs. We will continuously develop new innovative technologies and applied technologies. We offer high-value-added proposals that encompass equipment sales, contract rental services, and consumable parts sales.

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