[Analysis Case] Evaluation of Dopant Concentration Distribution in a-Si Thin Film Solar Cells Using SIMS
Select measurement conditions according to the target element.
We will introduce a case where the concentration distribution of dopants in a-Si (amorphous silicon) was quantitatively evaluated in flexible thin-film Si solar cells. The sample, sealed with resin, was disassembled, and SIMS analysis was conducted. In the analysis of B (Figure 3), measurements were performed with enhanced depth resolution because it exists in shallow areas on the surface side. In the analysis of P (Figure 4), a large amount of H exists in a-Si, causing mass interference; therefore, measurements were conducted under conditions that separated H from Si using high mass resolution methods to detect only P.
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Analysis of solar cells.
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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!