Magnetron sputtering equipment that can also be made as a film thickness electrode for various devices and sensors.
Labotech Co., Ltd.'s "LA-S2020" is a 2-inch magnetron DC sputtering device with a counter-parallel disk type. It allows for metal (Au/Pt, etc.) coating when observing non-conductive samples using a scanning electron microscope (SEM). This sputtering device can produce thin film electrodes (below 50nm) for various devices and sensors. It achieves efficient glow discharge with simple operations in a short time, enabling the production of sputtered films with excellent granularity. 【Features】 ■ Easy operation ■ High efficiency ■ Low cost *For more details, please contact us or download the catalog.
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basic information
【Specifications】 ■Sputtering Method: Magnetron Sputtering Method ■Target: Au Target (φ48mm): Standard ■Sputtering Time: 0.1–5 min (0.1 min/step): Digital Timer ■Sputtering Pressure: 6 Pa–15 Pa ■Exhaust Time: 0.1–999 min (0.1 min/step): Digital Timer ■Glass Bell Jar: Outer Diameter φ100 (Inner Diameter φ83) × Height 70 mm: Made of Glass ■Sample Stage: Φ40 mm: Standard ■T/S Distance: 30 mm–50 mm: Standard 30 mm ■Vacuum Pump: Directly Coupled 2-Stage Rotary Pump 10 L/min or more ■External Dimensions: Approximately 290 (W) × 460 (D) × 345 (H) mm ■Weight of Equipment: Approximately 15 kg (including pump) ■Power Supply: Single Phase AC 100V ±10% (50/60Hz) 0.5 KVA Type D Grounding 3P Outlet (1m) ■Installation Room Temperature/Humidity: 25±10℃/45–85% or less (no condensation) *This specification may change without notice for performance improvement. *For more details, please contact us or download the catalog.
Price range
P4
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For more details, please contact us or download the catalog.
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Company information
Since its establishment in 1987, Labotech has been selling instruments, consumables, and reagents for ESR (Electron Spin Resonance) devices, providing support in the research and development field, albeit modestly. In recent years, we have been involved in the sales and development of peripheral equipment related to electron microscopes. We aim to contribute to research and development in the fields of nanotechnology, biotechnology, and semiconductors by commercializing, selling, and providing services for vacuum-related equipment (such as vacuum deposition devices and sputtering devices), with the philosophy of "product development that leads to a step forward in research." We will do our utmost to become a trusted and expected company in the research field.
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