Manual Type Transparent Substrate Inspection Device

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last updated：Apr 18, 2019

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A substrate foreign matter inspection device that meets needs.

The "Manual Type Transparent Substrate Inspection Device" is a manual glass substrate surface inspection device/sapphire surface inspection device manufactured by YGK (Yamanashi Technical Workshop), designed for workpiece placement. It is compact and inexpensive, capable of measuring foreign substances on silicon wafers and glass substrates, and has made it possible to measure the separation of the front and back sides of glass substrates and detect latent defects on SiC surfaces, which were previously difficult. Additionally, we accept customer samples of silicon wafers/glass substrates and conduct sample measurements using the YPI series. 【Features】 ■ Unprecedented high speed, high precision, and low cost ■ Space-saving ■ Reduced measurement time, etc. *For more details, please contact us or download the catalog.

Related Link - http://www.fastgate.co.jp/kensa/

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basic information

【Specifications】 ■ Supported board size: Maximum 200mm × 200mm (consultation required for sizes over 200mm) ■ Scanning method: X-Y scan / Θ-X scan (spiral scan) ■ Throughput: Approximately 4 minutes for 200mm / Approximately 3 minutes for 200mm (high-speed scan compatible) ■ Workpiece placement: Manual ■ Equipment dimensions: W900mm × D1,000mm × H1,757mm ■ Main unit weight: Approximately 500kg ■ Power consumption: Approximately 1.5kW (100V) ■ Inspection target boards: Quartz glass boards, sapphire boards, SiC boards, SiC boards with epoxy film, etc. ■ Minimum detection sensitivity: 0.2μm for quartz glass boards *For more details, please contact us or download the catalog.