Publication of depth analysis results of multilayer films using an electron spectroscopy for chemical analysis (ESCA) device!
This case study collection presents examples of depth analysis of multilayer films using the photoelectron spectroscopy device "ESCA" from Ion Tech Center Co., Ltd., which provides services such as ion implantation, film formation and analysis, and research and commercialization management. The results of analyzing a stacked film of silicon oxide and titanium oxide on a silicon substrate using ESCA (Quantum-2000) are included. [Overview of Publication] ■Analysis results of depth analysis of multilayer films using ESCA *For more details, please refer to the catalog or feel free to contact us.
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【Published Content】 ■Analysis Results ■A diagram displaying the silicon spectrum for each sputtering cycle *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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The Ion Tech Center is a professional group that provides consulting and technical development support in "ion implantation," "physical analysis," and research and development. We aim to be a good partner for companies and university researchers as a creative laboratory equipped with cutting-edge technology and facilities that meet the demands of the times.