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  6. Case Studies on Depth Resolution Measurement in Compound Semiconductor Superlattice Samples

Case Studies on Depth Resolution Measurement in Compound Semiconductor Superlattice Samples

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last updated:Mar 18, 2019

イオンテクノセンター
イオンテクノセンター
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Results of depth resolution measurements using compound semiconductor superlattice samples are published!

This case study collection presents the results of depth resolution measurements conducted by Ion Tech Center Co., Ltd., which provides services such as ion implantation, film formation and analysis, and research and commercialization management. Using Q-pole SIMS (ULVAC: ADEPT-1010), we employed a compound semiconductor sample of Al0.28Ga0.72As/GaAs that was deposited by molecular beam epitaxy (MBE) in 50nm increments to obtain the results of depth resolution. [Overview of Contents] ■ Results of Depth Resolution Measurements *For more details, please refer to the catalog or feel free to contact us.*

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Case Studies on Depth Resolution Measurement in Compound Semiconductor Superlattice Samples

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  • Related Link - http://iontc.co.jp/project/physical_analysis/#page…

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【Contents】 ■Overview of SIMS (Secondary Ion Mass Spectrometry) ■About Sample Materials ■Analysis Results *For more details, please refer to the catalog or feel free to contact us.

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Case Studies on Depth Resolution Measurement in Compound Semiconductor Superlattice Samples

Case Studies on Depth Resolution Measurement in Compound Semiconductor Superlattice Samples

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イオンテクノセンター

イオンテクノセンター

Testing, Analysis and Measurement

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The Ion Tech Center is a professional group that provides consulting and technical development support in "ion implantation," "physical analysis," and research and development. We aim to be a good partner for companies and university researchers as a creative laboratory equipped with cutting-edge technology and facilities that meet the demands of the times.

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