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  6. [TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry

[TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry

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last updated:Apr 02, 2026

一般財団法人材料科学技術振興財団 MST
一般財団法人材料科学技術振興財団 MST
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This is a method for structural analysis of the sample surface. Due to its sensitivity to the surface compared to other analytical devices, it is suitable for identifying organic contaminants on the very surface.

This is a method for structural analysis of sample surfaces. It is suitable for identifying organic contamination on the very surface due to its sensitivity compared to other analytical devices. Using a sputter ion source, it is possible to analyze the distribution of inorganic and organic materials in the depth direction. - Structural analysis and identification of organic and inorganic compounds are possible. - Coordination data from foreign substance inspection devices can be linked. - Qualitative analysis is possible from micron-order microforeign substances to several centimeters. - It is possible to analyze the very surface with high sensitivity. - Image analysis is possible. - Qualitative analysis of depth direction analysis is possible.

    Contract AnalysisContract measurementContract Inspection
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[TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry

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  • Related Link - https://www.mst.or.jp/service/method/tof-sims/
  • Special site - Product/service details - https://pr.mono.ipros.com/mst/product/

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basic information

By reducing the amount of ion irradiation at one time, it becomes possible to maintain the molecular state of the surface and generate secondary ions. The obtained secondary ions are analyzed using a Time-of-Flight mass spectrometer.

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Applications/Examples of results

- Evaluation of components and cause investigation of discoloration areas (cloudiness, stains, etc.) and peeling areas - Qualitative analysis of residues, contaminants, and foreign substances (over several micrometers) for organic and inorganic materials - Evaluation of the outermost surface before and after treatment - Distribution evaluation of materials and additives in organic EL, organic solar cells, and polymer films - Evaluation of layer structure of metal thin films and qualitative assessment of impurities - Qualitative assessment of binders in secondary batteries, state of lithium, and degradation evaluation - Distribution evaluation of impurities and coating agents from powder surfaces - Evaluation of the penetration of chemicals into skin and hair - Evaluation of component distribution in films

Detailed information

  • 打ち合わせ.jpg

    Please consult with us first. ★ We will start by proposing an analysis plan ★ We can, of course, meet with you at your company. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!

  • セミナー.jpg

    We will hold a visiting seminar. ★ We offer free seminars with engineers visiting to meet customer needs ★ We will introduce analytical techniques and explain analytical data according to your requests. ◆ Example seminar content - Broad explanation of MST analytical methods - Detailed explanation of specific analytical methods from the principles - Explanation of the analytical data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!

News about this product(5)

Announcement of the new TOF-SIMS service starting from October 2016.

  • Product news

In October 2016, MST will introduce the latest high-resolution TOF-SIMS and begin analysis services. We will provide analysis services across a wide range of fields, including pharmaceuticals, biotechnology, medical devices, and product development and quality control related to electronics. Building on our proven TOF-SIMS analysis technology, we will further support our customers' research and development with high-quality data. For more details, please visit the URL below. http://www.mst.or.jp/corporate/tabid/1211/Default.aspx Introduction of analysis examples: • Introduction of new TOF-SIMS services [for pharmaceuticals, biotechnology, and medical devices] http://www.mst.or.jp/special/tabid/1194/Default.aspx • Introduction of new TOF-SIMS services [for the electronics field] http://www.mst.or.jp/special/tabid/1210/Default.aspx

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[Analysis Case] Evaluation of Depth Profile Concentration Distribution of Alkali Metals in SiO2 Using C60 has been published.

  • Catalog news

Alkali metals such as Li, Na, and K are key elements in various failure causes in semiconductors. These are referred to as mobile ions that can move within the film during measurement, making it difficult to obtain an accurate distribution. In this study, by conducting depth profiling analysis using a C60 (fullerene) sputter ion source in TOF-SIMS, it was found that the movement of alkali metals can be suppressed even at room temperature. This measurement allows for qualitative and quantitative analysis of impurities within SiO2 films. ★★★★★★★★★★★★★★★★★  Please see the link for the analysis data ★★★★★★★★★★★★★★★★★

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[MST Homepage] Special Feature on Organic EL Analysis Part 2 ★ Launch of New TOF-SIMS Analysis Service

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MST will strongly support the development of organic EL through analysis services! We have established a measurement environment to estimate the raw materials of the stacked organic films in organic EL panels, which have become more refined due to the high resolution of pixels. Through device evaluation and degradation assessment, MST will contribute to your research and development. ★★★ Analysis cases introduced this time ★★★ - Depth analysis of organic material degradation components ~ Component evaluation of organic EL degradation layers ~ - Depth analysis of polyimide components ~ Surface modification layer evaluation of organic materials is possible ~ - Depth analysis of organic EL components ~ Evaluation of organic components in micro pixel areas ~ [This is a new service!] Thanks to the new sputtering conditions of TOF-SIMS, depth analysis can now be performed without damaging organic components. - Structural estimation of organic EL materials ~ Case study of material structure estimation using Q-Tof type LC/MS/MS ~ ******************************************* For detailed data, please see the link! *******************************************

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[Analysis Case] Chitosan Distribution Evaluation Released

  • Catalog news

Chitosan is used in a wide range of fields such as medicine, food, cosmetics, and clothing due to its antibacterial and moisturizing properties. Some cotton swabs, which are everyday items, are formulated with chitosan to provide antibacterial effects. Therefore, we evaluated the chitosan contained in cotton swabs using TOF-SIMS, which allows for visualization through mapping and component assessment through spectral measurement. ★★★★★★★★★★★★★★★★★ Please see the linked page for analysis data. ★★★★★★★★★★★★★★★★★

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一般財団法人材料科学技術振興財団 MST

一般財団法人材料科学技術振興財団 MST

Testing, Analysis and Measurement

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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