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  6. Quadrupole Mass Spectrometer "TDS1200II"

Quadrupole Mass Spectrometer "TDS1200II"

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last updated:Sep 07, 2023

電子科学
電子科学
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A quadrupole mass spectrometer capable of real-time detection with high sensitivity!

The "TDS1200II" is an analytical device that detects in real-time the components released from a sample when it is heated with infrared radiation in an ultra-high vacuum environment using a quadrupole mass spectrometer (QMS). This product is equipped with a load lock, which is essential for improving measurement efficiency and maintaining a high-quality ultra-high vacuum environment in the analysis chamber, eliminating the need to set the sample after bringing the pressure in the analysis chamber to atmospheric pressure. Additionally, the arrangement of the QMS achieves high sensitivity. 【Features】 ■ High sensitivity ■ QMS arrangement ■ Load lock equipped ■ Real-time detection ■ Maintenance of a high-quality ultra-high vacuum environment *For more details, please refer to the catalog or feel free to contact us.

    Analytical Equipment and Devices
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Quadrupole Mass Spectrometer "TDS1200II"

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  • Related Link - https://www.escoltd.co.jp/products/infrared-heatin…

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【Specifications】 ■Sample size: 15×15×t4mm or less ■Sample shape  ・No specific restrictions  ・Simple flat samples can be transferred without a holder  ・Powder samples and complex-shaped samples can be measured using a holder ■Sensitivity: Desorption rate 1×10^11 Ar/s (at S/N=3) ■Repeatability: 2α < 5% (MID mode/1 day) ■Sample heating chamber 〔Detector〕  ・Quadrupole mass spectrometer (QMS)  ・Mass range: 1 to 199 Da  ・Mass resolution: (M/ΔM) ≧ M   ※Mass range expansion and high resolution options available  ・Internal volume: approximately 10 L (0.01 m³)  ・Heating method: Near-infrared irradiation through synthetic quartz light guide  ・Heating source: 1KW halogen lamp       ※Can be changed to a 2KW halogen lamp heating source (optional)  ・Temperature detector: Thermocouple (in contact with the sample stage and sample surface)         Thermocouple material: Tungsten-Rhenium alloy (W/Re 5-26) *For more details, please refer to the catalog or feel free to contact us.

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Analysis device "TDS1200II"

Analysis device "TDS1200II"

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Water and ammonia in CVD-SiN film

Water and ammonia in CVD-SiN film

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Water in PEALD-SiO2 film

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電子科学

電子科学

Industrial Machinery

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Electronics Science Co., Ltd. is a company that brings requested analytical devices to life. We handle a variety of analytical instruments, including a thermal desorption analysis device capable of clean sample heating in ultra-high vacuum from room temperature to 1400°C, high-frequency heating thermal desorption analysis devices, and low-temperature thermal desorption hydrogen analysis devices. We also sell various consumables to users who have introduced our devices. Additionally, we accept requests for maintenance and overhauls, so please feel free to contact us.

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