Positioning with 10nm resolution. Equipped with slowdown function.
It can be used as a 10nm resolution positioning device in combination with a 10nm feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. The FC-514 is compatible with slow-down sensor signals and ORG sensor signals. The 10nm feedback stage is equipped with a slow-down sensor on the long-scale type stage, enabling high-speed positioning of long strokes with high resolution, which can expand the range of measurement data. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
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basic information
Model: FC-514 Compatible Stages: FS-3200PX, stages similar to FC-511 Number of Control Axes: 2 Minimum Command Unit: 10nm In-Position Range: ±10nm (±30nm, ±70nm selectable) Maximum Operating Speed Setting: 50mm/sec (performance of connected stage takes priority) Control Interface: Emergency stop input, GP-IB, USB, Ethernet, General I/O Teaching Function: 200 lines × 5 channels (1 command per line) Power Supply: AC100V–240V
Price range
P4
Delivery Time
Applications/Examples of results
Positioning applications for advanced research, optical system positioning, and positioning during microdevice evaluation.
Line up（2）
| Model number | overview |
|---|---|
| FC-514 | A version that supports slow down sensor input and ORG sensor input compared to FC-511 |
| FC-511 | Successor to FC-501A |
catalog（3）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.