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  5. Other inspection equipment and devices
  6. 5nm Feedback Stage Controller FC-611

5nm Feedback Stage Controller FC-611

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FC-611

last updated:Jun 03, 2019

シグマ光機
シグマ光機
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Streamline inspections and research! Positioning control is possible with 5nm resolution.

It can be used as a 5nm resolution positioning device in combination with a 5nm feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.

    Other inspection equipment and devicesOther FA equipment
fc611_image.jpg

5nm Feedback Stage Controller FC-611

fc611_image.jpg
fc611_image.jpg
  • Related Link - https://www.global-optosigma.com/jp/

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basic information

Model: FC-611 Compatible Stages: FS-10□0SPX Series, FS-10□0SPX(V) Series Number of Control Axes: 2 Minimum Command Unit: 5nm In-Position Range: ±5nm (±15nm, ±35nm selectable) Maximum Operating Speed Setting: 30mm/sec (dependent on the performance of the connected stage) Control Interface: Emergency Stop Input, GP-IB, USB, Ethernet, General I/O Teaching Function: 200 lines × 5 channels (1 command per line) Power Supply: AC100V–240V

Price range

P4

Delivery Time

Please contact us for details

Applications/Examples of results

Positioning applications in cutting-edge research, such as positioning with electron beams and laser light.

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Model number overview
FC-611 Successor model of FC-601A

catalog(5)

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5nm Feedback Stage System Catalog

5nm Feedback Stage System Catalog

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Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

CATALOG
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Vacuum-Compatible 5nm Feedback Stage System Catalog

Vacuum-Compatible 5nm Feedback Stage System Catalog

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FS-1050SPX Catalog

FS-1050SPX Catalog

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Precision Positioning Stage 'Q&A You Should Know When Selecting'

Precision Positioning Stage 'Q&A You Should Know When Selecting'

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Company information

シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

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  • Measurement and Analysis
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