Vacuum-compatible positioning table <MT>
Our company conducts its own evaluation of released gases, so even when used in a high vacuum environment, there is minimal impact on other equipment within the chamber, allowing us to provide accurate specifications for vacuum applications.
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basic information
This is a compact positioning stage compatible with a vacuum level of 5×10^-5 Pa. 【Features】 - Equipped with a vacuum-compatible stepping motor (in-house manufactured) - Equipped with a vacuum-compatible photo sensor (in-house manufactured) - Designation of vacuum grease brand is possible; non-grease options are also available - Utilizes cross roller guides in the guiding system to achieve high rigidity and high precision, ensuring stable movement - Options such as brackets that can be combined in multi-axis configurations like XY, XYZ, and θ axes are available - Can be used in environments other than vacuum, such as high-temperature environments or environments that are sensitive to outgassing - There are models that meet clean specifications equivalent to JIS Clean Class 4 with the same performance [Specifications] External dimensions: W26 × L110 × H36 [mm] Stroke: 10 [mm] *Other lineups are available ⇒ For more details, please inquire via download. ⇒ For inquiries regarding vacuum-compatible products, estimates, etc., please contact us through the comments below.
Price range
P3
Delivery Time
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For more details, please inquire through a request for materials or download.
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Company information
Our company is committed to 'monozukuri' (manufacturing), nurturing and enhancing our technical capabilities. We utilize this to connect companies with specialized fields and strengths, aiming to create new innovations.