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Noberion Systems Co., Ltd. is a technology development venture company originating from the large current negative ion source technology for nuclear fusion plasma heating devices. In response to new technological needs, we are developing an ECR (Electron Cyclotron Resonance) high-density plasma source and an ECR large current ion beam source that can use oxygen and various active gases. Customers considering various plasma application devices are encouraged to contact us. 【Business Description】 ■ Development and manufacturing sales of plasma application devices ■ Contract processing of special film deposition processes *For more details, please refer to our catalog or feel free to contact us.
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【Products Offered】 ■ High-Power ECR Plasma Source (EPS-120) ■ Compact ECR Atomic Beam Source (ERS-35) ■ Amperage-Class Ion Source for Milling Equipment ■ EDR Line Beam Ion Source (ELBS-150) *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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Noberion Systems Co., Ltd. is a company that develops and manufactures plasma application devices and offers contract processing for special film deposition processes. As a technology development-oriented venture company, it is advancing the development of ECR (Electron Cyclotron Resonance) high-density plasma sources and ECR high-current ion beam sources to meet new technological needs using oxygen and various active gases.