It is possible to perform elemental analysis with a shallow detection depth while conducting SEM observation.
SEM-EDX analysis and AES analysis are suitable for simple investigations of discoloration and foreign substances on metal surfaces. However, when the discoloration or foreign substances are thin or small, AES analysis, which provides information from very shallow areas of the surface (about 4-5 nm), is effective. The AES equipment owned by MST can acquire SEM images, allowing AES analysis to be conducted while confirming the areas of interest using SEM images. In this case study, we will present data comparing the evaluation of discoloration on the Cu surface using AES analysis and SEM-EDX analysis. Additionally, we will also present the results of AES depth direction analysis.
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For detailed data, please refer to the catalog.
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Applications/Examples of results
Analysis of LSI, memory, electronic components, manufacturing equipment, and parts.
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Download All Catalogs![[Analysis Case] Evaluation of Cu Surface Discoloration Using AES and SEM-EDX_C0451](https://image.mono.ipros.com/public/catalog/image/01/b56/364336/IPROS50152166881372698970.jpeg?w=120&h=170)
Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!
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